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Trends for the digital transformation of metrology and regulation of metrology through IT have some keywords in common with the main properties of the blockchain, such as traceability, immutability, and machine-readable documents.
Kruno Miličević +3 more
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Metrology Challenges in 3D NAND Flash Technical Development and Manufacturing
3D NAND technical development and manufacturing face many challenges to scale down their devices, and metrology stands out as much more difficult at each turn. Unlike planar NAND, 3D NAND has a three-dimensional vertical structure with high-aspect ratio.
Wei Zhang +4 more
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A digital framework for metrological information
A digital-system structure is very important for developing Metrology for Digital Transformation (M4DT) at NMIs. A plan for the digital transformation in metrology at the National Institute of Metrology (NIM), China is proposed.
XingChuang Xiong +4 more
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Quantum Metrology with Cold Atoms
Quantum metrology is the science that aims to achieve precision measurements by making use of quantum principles. Attribute to the well-developed techniques of manipulating and detecting cold atoms, cold atomic systems provide an excellent platform for ...
Huang, Jiahao +3 more
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Metrology: where do we stumble?
The article presents the main milestones in the development of the science of metrology, identifies the controversial and difficult aspects of the development of this area of scientific knowledge.
Ю. П. Адлер
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Diffraction-Based Overlay Metrology With Optical Convolution Layer
Overlay is a crucial indicator of manufacturing processing between layers. Currently, diffraction-based overlay (DBO) is widely adopted in overlay metrology.
Jinyang Li, Hung-Fei Kuo
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A low cost scheme for high precision dual-wavelength laser metrology
A novel method capable of delivering relative optical path length metrology with nanometer precision is demonstrated. Unlike conventional dual-wavelength metrology which employs heterodyne detection, the method developed in this work utilizes direct ...
Ireland, Michael J. +5 more
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Review of the mathematical foundations of data fusion techniques in surface metrology [PDF]
The recent proliferation of engineered surfaces, including freeform and structured surfaces, is challenging current metrology techniques. Measurement using multiple sensors has been proposed to achieve enhanced benefits, mainly in terms of spatial ...
Ai C +34 more
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Investigation in optimisation of accuracy with non-contact systems by influencing variable processes [PDF]
The use of 3D scanning systems is becoming increasingly popular and an essential tool for manufacturers for inspection and measurement. With such systems being utilised on the manufacturing shop floor due to their portability and ease of use, it is no ...
Gashi, Bekim V. +3 more
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The GRAVITY metrology system: modeling a metrology in optical fibers
GRAVITY is the second generation VLT Interferometer (VLTI) instrument for high-precision narrow-angle astrometry and phase-referenced interferometric imaging.
Amorim, A. +22 more
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