본 발명은 MEMS (Microelectromechanical systems) 및 NEMS (Nanoelectromechanical systems)와 같은 초소형 소자를 제작하는 방법에 관한 것이다. 본 발명에 의하면, MEMS(Microelectromechanical systems) 및 NEMS(Nanoelectromechanical systems)와 같은 초소형 소자를 제조하는 방법에 있어서, 고분자 층을 형성하는 단계; 및 상기 고분자 층을 ...
이승섭
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Prospects and Trends in Biomedical Microelectromechanical Systems (MEMS) Devices: A Review. [PDF]
Welburn L +3 more
europepmc +1 more source
Resonant Drive Techniques for Electrostatic Microelectromechanical Systems (MEMS): A Comparative Study. [PDF]
Abdelrahman R +7 more
europepmc +1 more source
Ceramics for Microelectromechanical Systems Applications: A Review. [PDF]
Fallah Nia E, Kouki A.
europepmc +1 more source
Ex Vivo Optical Coherence Tomography Analysis of Resected Human Bladder with a Forward-Looking Microelectromechanical Systems Mirror-Based Catheter. [PDF]
Remmelink MJ +8 more
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This report contains the following sections: Automotive Electrical and Electronic Systems; Modeling, Monitoring, and Control of Power Systems; Power Electronics and Electromechanics; Sensors, Nanotechnology, and Microelectromechanical Systems; Enhanced ...
Kassakian, John G.
core
A Review on the Inertial Measurement Unit Array of Microelectromechanical Systems. [PDF]
Xuan J, Zhu T, Peng G, Sun F, Dong D.
europepmc +1 more source
Design of multi-bandwidth piezoelectric microelectromechanical systems accelerometers for totally implantable auditory prostheses: How many bandwidths are enough? [PDF]
Kitsopoulos P, Grosh K.
europepmc +1 more source
A Survey to Assess the Quality of the Data Obtained by Radio-Frequency Technologies and Microelectromechanical Systems to Measure External Workload and Collective Behavior Variables in Team Sports. [PDF]
Rico-González M +4 more
europepmc +1 more source
Noise Analysis and Suppression Methods for the Front-End Readout Circuit of a Microelectromechanical Systems Gyroscope. [PDF]
He C +6 more
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