Results 131 to 140 of about 9,370,821 (226)

Microelectromechanical device including pyrolyzed polymer structure and method for fabricating the same

open access: yes, 2011
본 발명은 MEMS (Microelectromechanical systems) 및 NEMS (Nanoelectromechanical systems)와 같은 초소형 소자를 제작하는 방법에 관한 것이다. 본 발명에 의하면, MEMS(Microelectromechanical systems) 및 NEMS(Nanoelectromechanical systems)와 같은 초소형 소자를 제조하는 방법에 있어서, 고분자 층을 형성하는 단계; 및 상기 고분자 층을 ...
이승섭
core   +1 more source

Resonant Drive Techniques for Electrostatic Microelectromechanical Systems (MEMS): A Comparative Study. [PDF]

open access: yesSensors (Basel)
Abdelrahman R   +7 more
europepmc   +1 more source

Ex Vivo Optical Coherence Tomography Analysis of Resected Human Bladder with a Forward-Looking Microelectromechanical Systems Mirror-Based Catheter. [PDF]

open access: yesSensors (Basel)
Remmelink MJ   +8 more
europepmc   +1 more source

Report to the President for year ended June 30, 2004, Laboratory for Electromagnetic and Electronic Systems

open access: yes, 2004
This report contains the following sections: Automotive Electrical and Electronic Systems; Modeling, Monitoring, and Control of Power Systems; Power Electronics and Electromechanics; Sensors, Nanotechnology, and Microelectromechanical Systems; Enhanced ...
Kassakian, John G.
core  

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