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Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems. [PDF]

open access: yesMicromachines (Basel), 2018
Ortigoza-Diaz J   +8 more
europepmc   +1 more source

Australian Network on Microelectronics, Optoelectronics and Microelectromechanical Systems

open access: yes
Australian Network on Microelectronics, Optoelectronics and Microelectromechanical Systems. The Network will encompass semiconductor microelectronics, optoelectronics, sensors and microelectromechanical systems (MEMS). Fundamental research in these areas

core  

Microelectromechanical systems (MEMS) [PDF]

open access: yes2011 IEEE 43rd Southeastern Symposium on System Theory, 2011
openaire   +1 more source

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