Results 171 to 180 of about 7,805 (187)
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MICROELECTROMECHANICAL SYSTEM RESONATOR ASSEMBLY
2021SAARELA VILLE, JAAKKOLA ANTTI, OJA AARNE
openaire +2 more sources
Medical Applications of Piezoelectric Microelectromechanical Systems
Integrated Ferroelectrics, 2013Susan Trolier-Mckinstry
exaly
Characterization of microelectromechanical systems by digital holography method
Imaging Science Journal, 2006Giuseppe Coppola +2 more
exaly
Improvement of current distribution uniformity on substrates for microelectromechanical systems
Journal of Micro/ Nanolithography, MEMS, and MOEMS, 2004Jong-Min Lee, Alan West, James J Kelly
exaly
On forces in microelectromechanical systems
International Journal of Engineering Science, 2003ShuâAng Zhou
exaly
Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems, 2022openaire +1 more source

