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Decoupled Characterization of Electro-opto-mechanical Transduction - Leveraging Pull-in Hysteresis in NEMS Photonic Modulators. [PDF]
Cochran A +3 more
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100-Second Large-Area Chemical Imaging by Integrated Four-Channel CARS Microscopy. [PDF]
Ju W +12 more
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Microelectromechanical systems in electrical metrology
Microelectromechanical systems (MEMS) will have an important role in metrology. The essential features of a MEMS are (1) a piece of single crystal silicon forming a spring; (2) metallized surfaces of silicon structures that define an electrode geometry; (3) electrostatic forces between surfaces in a vacuum.
Kyynäräinen, Jukka +3 more
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Contact‐Printed Microelectromechanical Systems
Advanced Materials, 2010Corinne E, Packard +4 more
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Microelectromechanical systems in urology
Urology, 2003S ince the mid-1980s, minimally invasive surgery has evolved with the creation of such devices as 3-mm instruments and miniature probes for percutaneous therapies. However, one must ask, “When does it end? How small is too small?” This fundamental question is the foundation of microelectromechanical systems or MEMS technology.
Blaine, Kristo +5 more
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Structured design of microelectromechanical systems
Proceedings of the 34th annual conference on Design automation conference - DAC '97, 1997In order to efficiently design complex microelectromechanical systems (MEMS) having large numbers of multi-domain components, a hierarchically structured design approach that is compatible with standard IC design is needed. A graphical-based schematic, or structural, view is presented as a geometrically intuitive way to represent MEMS as a set of ...
Tamal Mukherjee, Gary K. Fedder
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Noise in microelectromechanical system resonators
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1999Microelectromechanical system (MEMS) and nanoelectromechanical system (NEMS) based resonators and filters, ranging in frequencies from kHz to GHz, have been proposed. The question of how the stabilities of such resonators scale with dimensions is examined in this paper, with emphasis on the noise characteristics.
J R, Vig, Y, Kim
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