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Microelectromechanical systems in urology
Urology, 2003S ince the mid-1980s, minimally invasive surgery has evolved with the creation of such devices as 3-mm instruments and miniature probes for percutaneous therapies. However, one must ask, “When does it end? How small is too small?” This fundamental question is the foundation of microelectromechanical systems or MEMS technology.
Blaine, Kristo +5 more
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Noise in microelectromechanical system resonators
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1999Microelectromechanical system (MEMS) and nanoelectromechanical system (NEMS) based resonators and filters, ranging in frequencies from kHz to GHz, have been proposed. The question of how the stabilities of such resonators scale with dimensions is examined in this paper, with emphasis on the noise characteristics.
J R, Vig, Y, Kim
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Structured design of microelectromechanical systems
Proceedings of the 34th annual conference on Design automation conference - DAC '97, 1997In order to efficiently design complex microelectromechanical systems (MEMS) having large numbers of multi-domain components, a hierarchically structured design approach that is compatible with standard IC design is needed. A graphical-based schematic, or structural, view is presented as a geometrically intuitive way to represent MEMS as a set of ...
Tamal Mukherjee, Fedder, Gary K.
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Nonlinear Dynamics of Microelectromechanical Systems
Journal of Vibration and Control, 2006We investigate the dynamic behavior of a micromachined switch including a thin metal membrane called the “bridge”. A nonlinear model is presented considering mechanical force, electrostatic force, and the squeeze-film damping force, and the dynamic equations of a double model for the micromachined system are derived.
Liu, Liqin, Gang, Tangyou, Wu, Zhiqiang
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Microelectromechanical systems (MEMS)
1997 IEEE Aerospace Conference, 1997The following topics are dealt with: MEMS fundamentals; MEMS fabrication technology; MEMS market and industry structure; defense applications; investment assessment; inertial measurement devices; multiple device chips; optical MEMS components; monolithic free-space optical disk pickup head; digital micromirror display; optomechanical displays ...
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Microelectromechanical systems
Proceedings IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits, 2002M. Mehregany, M.A. Huff
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