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The teaching of microelectromechanical systems (MEMS)
Proceedings 1999 IEEE International Conference on Microelectronic Systems Education (MSE'99) 'Systems Education in the 21st Century' (Cat. No.99-63794), 2003MEMS technology is now where integrated circuit technology was about 30 years ago. It is clearly going to be pervasively important. Both commercial volume and patents on MEMS are growing at rates exceeding 20% annually. The teaching of MEMS technology, now in its early stages, must keep pace.
Mona E. Zaghloul, David J. Nagel
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Nonlinear Dynamics of Microelectromechanical Systems
Journal of Vibration and Control, 2006We investigate the dynamic behavior of a micromachined switch including a thin metal membrane called the “bridge”. A nonlinear model is presented considering mechanical force, electrostatic force, and the squeeze-film damping force, and the dynamic equations of a double model for the micromachined system are derived.
Liu, Liqin, Gang, Tangyou, Wu, Zhiqiang
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Surface micromachining for microelectromechanical systems
Proceedings of the IEEE, 1998Surface micromachining is characterized by the fabrication of micromechanical structures from deposited thin films. Originally employed for integrated circuits, films composed of materials such as low-pressure chemical-vapor-deposition polycrystalline silicon, silicon nitride, and silicon dioxides can be sequentially deposited and selectively removed ...
James M. Bustillo +2 more
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Microelectromechanical systems (MEMS) tutorial
Proceedings International Test Conference 1998 (IEEE Cat. No.98CH36270), 2002Using the fabrication techniques and materials of microelectronics as a basis, MEMS processes construct both mechanical and electrical components. Mechanical components in MEMS, like transistors in microelectronics, have dimensions that are measured in microns and numbers measured from a few to millions.
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Overview Of Microelectromechanical Systems And Design Processes
Proceedings of the 34th Design Automation Conference, 1997New design tools and automation strategies are neededto create robust, cost-effective, and manufacturable micro-machineddevices and systems. Some of the design automationissues include mixed-technology simulation, materialproperty prediction in the micron-size regime, self-consistencyin coupled electromechanical devices, integratedmodeling environment,
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Microelectromechanical systems
Proceedings IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits, 2002M. Mehregany, M.A. Huff
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