Results 181 to 190 of about 14,681 (227)
Microelectromechanical systems in electrical metrology
IEEE Transactions on Instrumentation and Measurement, 2001 Microelectromechanical systems (MEMS) will have an important role in metrology. The essential features of a MEMS are (1) a piece of single crystal silicon forming a spring; (2) metallized surfaces of silicon structures that define an electrode geometry; (3) electrostatic forces between surfaces in a vacuum.
Kyynäräinen, Jukka +3 more
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Contact‐Printed Microelectromechanical Systems
Advanced Materials, 2010Corinne E, Packard +4 more
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Microelectromechanical systems in urology
Urology, 2003S ince the mid-1980s, minimally invasive surgery has evolved with the creation of such devices as 3-mm instruments and miniature probes for percutaneous therapies. However, one must ask, “When does it end? How small is too small?” This fundamental question is the foundation of microelectromechanical systems or MEMS technology.
Blaine, Kristo +5 more
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Structured design of microelectromechanical systems
Proceedings of the 34th annual conference on Design automation conference - DAC '97, 1997In order to efficiently design complex microelectromechanical systems (MEMS) having large numbers of multi-domain components, a hierarchically structured design approach that is compatible with standard IC design is needed. A graphical-based schematic, or structural, view is presented as a geometrically intuitive way to represent MEMS as a set of ...
Tamal Mukherjee, Gary K. Fedder
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Noise in microelectromechanical system resonators
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1999Microelectromechanical system (MEMS) and nanoelectromechanical system (NEMS) based resonators and filters, ranging in frequencies from kHz to GHz, have been proposed. The question of how the stabilities of such resonators scale with dimensions is examined in this paper, with emphasis on the noise characteristics.
J R, Vig, Y, Kim
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Nonlinear Dynamics of Microelectromechanical Systems
Journal of Vibration and Control, 2006We investigate the dynamic behavior of a micromachined switch including a thin metal membrane called the “bridge”. A nonlinear model is presented considering mechanical force, electrostatic force, and the squeeze-film damping force, and the dynamic equations of a double model for the micromachined system are derived.
Liu, Liqin, Gang, Tangyou, Wu, Zhiqiang
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The teaching of microelectromechanical systems (MEMS)
Proceedings 1999 IEEE International Conference on Microelectronic Systems Education (MSE'99) 'Systems Education in the 21st Century' (Cat. No.99-63794), 2003MEMS technology is now where integrated circuit technology was about 30 years ago. It is clearly going to be pervasively important. Both commercial volume and patents on MEMS are growing at rates exceeding 20% annually. The teaching of MEMS technology, now in its early stages, must keep pace.
Mona E. Zaghloul, David J. Nagel
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Surface micromachining for microelectromechanical systems
Proceedings of the IEEE, 1998Surface micromachining is characterized by the fabrication of micromechanical structures from deposited thin films. Originally employed for integrated circuits, films composed of materials such as low-pressure chemical-vapor-deposition polycrystalline silicon, silicon nitride, and silicon dioxides can be sequentially deposited and selectively removed ...
James M. Bustillo +2 more
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Langasite for microelectromechanical systems
physica status solidi (a), 2010AbstractPiezoelectrically actuated plano‐convex thickness shear mode (TSM) resonators in lanthanum gallium silicate (langasite, LGS, La3Ga5SiO14) were fabricated. For the fabrication of the devices different micromachining technologies were investigated.
Erik Ansorge +3 more
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