Results 181 to 187 of about 7,805 (187)

Journal of Microelectromechanical Systems

Journal of Microelectromechanical Systems, 2017
openaire   +2 more sources

MICROELECTROMECHANICAL SYSTEM FOR TUNING LASERS

2015
SCHENK HARALD, GRAHMANN JAN, WAGNER JOACHIM, OSTENDORF RALF, RATTUNDE MARCEL   +4 more
openaire   +3 more sources

Principles of free-space optical microelectromechanical systems

Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, 2008
exaly  

Microelectromechanical Systems and Multisensor Systems

2016
openaire   +1 more source

Dynamics of Microelectromechanical Systems

2007
openaire   +1 more source

Process for the production of microelectromechanical systems

2009
openaire   +2 more sources

Principles of Microelectromechanical Systems

2010
openaire   +1 more source