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Microelectromechanical systems (MEMS) tutorial
Proceedings International Test Conference 1998 (IEEE Cat. No.98CH36270), 2002Using the fabrication techniques and materials of microelectronics as a basis, MEMS processes construct both mechanical and electrical components. Mechanical components in MEMS, like transistors in microelectronics, have dimensions that are measured in microns and numbers measured from a few to millions.
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Overview Of Microelectromechanical Systems And Design Processes
Proceedings of the 34th Design Automation Conference, 1997New design tools and automation strategies are neededto create robust, cost-effective, and manufacturable micro-machineddevices and systems. Some of the design automationissues include mixed-technology simulation, materialproperty prediction in the micron-size regime, self-consistencyin coupled electromechanical devices, integratedmodeling environment,
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Microelectromechanical systems (MEMS)
1997 IEEE Aerospace Conference, 1997The following topics are dealt with: MEMS fundamentals; MEMS fabrication technology; MEMS market and industry structure; defense applications; investment assessment; inertial measurement devices; multiple device chips; optical MEMS components; monolithic free-space optical disk pickup head; digital micromirror display; optomechanical displays ...
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Microelectromechanical systems
Proceedings IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits, 2002M. Mehregany, M.A. Huff
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