Results 201 to 210 of about 9,370,821 (226)
Some of the next articles are maybe not open access.
Future of Microelectromechanical Systems (MEMS)
Sensors and Actuators A: Physical, 1996Minhang Bao, Weiyuan Wang
exaly
Microelectromechanical System Cantilever-Based Frequency Doublers
Journal of Intelligent Material Systems and Structures, 2013Joydeep Basu, Tarun Kanti Bhattacharyya
exaly
Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems, 2023openaire +2 more sources
MICROELECTROMECHANICAL SYSTEM RESONATOR ASSEMBLY
2021SAARELA VILLE, JAAKKOLA ANTTI, OJA AARNE
openaire +2 more sources
Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems, 2022openaire +1 more source
Slide Film Damping in Microelectromechanical System Devices
Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems, 2013Jianyuan Jia
exaly

