Results 221 to 227 of about 14,681 (227)
Some of the next articles are maybe not open access.
Structural and instrumentation design of a microelectromechanical systems biaxial accelerometer
Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, 2014Ting Zou, Jorge Angeles
exaly
On forces in microelectromechanical systems
International Journal of Engineering Science, 2003exaly
Principles of free-space optical microelectromechanical systems
Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, 2008exaly

