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A remote laboratory for microelectronics fabrication

2008 38th Annual Frontiers in Education Conference, 2008
During the last decade there has been a move towards using remote laboratories in engineering education. These labs allow students to control either electrical or mechanical systems remotely via the internet. At the University of South Australia (UniSA), we have been developing a remote lab that will allow users to visually inspect and test ...
Aaron Mohtar, Zorica Nedic, Jan Machotka
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Electrically Insulative Adhesives for Hybrid Microelectronic Fabrication

IEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1977
The use of insulative adhesives for attachment of alumina substrates to metallic headers is gaining considerable interest in the areas of hybrid microcircuit fabrication. However, many unresolved problems concerning long-term reliability of hybrid circuits using organic materials continues to plague the industry. Thus, the purposes of the investigation
G. W. Brassell, D. R. Fancher
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The Microelectronics Fabrication of VHF Systems

IEEE Transactions on Aerospace, 1965
The need for microelectronics in aerospace systems arises from demands for increased reliability and payload. Much existing equipment can be converted to microelectronics without extensive redesign, without sacrificing reliability, and without increasing circuit fabrication costs.
M. Shannon, D. L. Cannon
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Design And Fabrication Of Microelectronic Lenses

SPIE Proceedings, 1980
Programs written to assist in the design and evaluation of microelectronic lenses are briefly described. Over the past 15 years, several families of lenses were designed using these programs. Basically, the higher order aberrations are mapped for a series of similar designs with corrected Seidel aberrations.
R. E. Tibbetts, J. S. Wilczynski
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Focused Ion Beams in Microelectronic Fabrication

IEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1983
For more than 20 years the designers and fabricators of integrated circuits and microstructure devices have strived toward smaller features as a means of achieving higher packing density, better performance, and lower cost. The new field of microlithography has emerged as a result of these pressures.
J. Doherty, B. Ward, E. Kellogg
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Laser Diagnostics of Microelectronics Fabrication Processes

MRS Proceedings, 1988
AbstractLaser diagnostics, including long path infrared diode laser absorption and dye laser induced fluorescence, are able to provide microscopic information on the gas phase of such important semiconductor fabrication processes as plasma etching and plasma enhanced deposition.
J. Wormhoudt, K. McCurdy, A. Freedman
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On Microelectronic Components, Interconnections, and System Fabrication

Papers presented at the May 3-5, 1960, western joint IRE-AIEE-ACM computer conference on - IRE-AIEE-ACM '60 (Western), 1960
Microelectronic data processing systems are analyzed and various requirements for components are considered. The rapid reduction in transmission line cross section upon scaling down causes increased losses in microelectronic systems thus giving rise to the need for high impedance components for non-cryogenic applications.
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