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Importance of Interfaces in Microelectronic Device Fabrication
1987Microelectronic device fabrication currently relies totally upon photoresist processing for pattern delineation in integrated circuit fabrication. Adhesion of polymeric photoresist patterns, especially those of submicron dimensions, to the various substrates encountered is therefore of paramount importance. Poor photoresist adhesion has been cured by a
J. N. Helbert +3 more
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Equipment for Optoelectronic and Microelectronic Deviceb Fabrication
2001Abstract : This report details equipment purchased and installed as a result of a DURIP Grant "Equipment for optoelectronic and Microelectronic device fabrication", 04/01/2000 - 03/3l/2001, total budget: $202,630.00 The purchased equipment has drastically enhanced the capabilities for optoelectronic and microelectronic device fabrication and processing
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Micromechanisms fabrication: a challenge in micromechanics and microelectronics
1992 IEEE International Solid-State Circuits Conference Digest of Technical Papers, 2003Micromechanisms fall into two broad categories: sensors and actuators. Actuators convert electric energy to mechanical energy, whereas sensors convert physical quantities such as force and pressure to electronic signals. The sensor area, in particular the resonating sensor, appears to have the earmarks of practical applications.
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Limit on the Microelectronic Fabrication
Japanese Journal of Applied Physics, 1975openaire +1 more source
Introduction to microelectronic fabrication
Microelectronics Reliability, 1988openaire +1 more source
Microelectronics: Fabrication and Technology BY Dr.M.Madhusudhan Reddy
Bringing a book like "Microelectronics: Fabrication and Technology" to fruition is a collaborative effort, and I'm deeply grateful to everyone who contributed to its creation. First and foremost, I extend my heartfelt thanks to my family for their unwavering support, patience, and understanding throughout the many hours dedicated to this project ...openaire +1 more source

