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Microfabrication as a Scientific Tool
Science, 1983Research in microfabrication not only serves the microelectronics industry but also can provide research tools for studying the behavior of matter at submicrometer dimensions. A variety of techniques including optical, x-ray, and electron beam lithography and reactive ion etching can be used to make structures, devices, and arrays only hundreds of ...
R E, Howard +4 more
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Microfabricated incandescent lamps
Applied Optics, 1991A silicon filament vacuum sealed incandescent light source has been fabricated using IC technology. The incandescent source consists of a heavily doped p(+) polysilicon filament coated with silicon nitride and enclosed in a vacuum sealed ( approximately 80-mT) cavity in the silicon chip surface.
C H, Mastrangelo, R S, Muller, S, Kumar
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Photolithography‐Based Microfabrication of Biodegradable Flexible and Stretchable Sensors
Advanced Materials, 2023Levent Beker
exaly
Microfabrication and nanotechnology in manufacturing system – An overview
Materials Today: Proceedings, 2021Olawale Samuel Fatoba +2 more
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Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems
Micromachines, 2018James Yoo +2 more
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