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Microactuators and micromachines
Proceedings of the IEEE, 1998Research and development in microelectromechanical systems (MEMS) have made remarkable progress since 1988, when an electrostatic micromotor the size of a human hair was first operated successfully. Since then, many types of microactuators utilizing various driving forces and mechanisms have been developed. Distinctive features of MEMS (miniaturization,
openaire +1 more source
Laser-based hybrid micromachining processes: A review
Optics and Laser Technology, 2022Ashish Kumar Sahu +2 more
exaly
Micromachines. Application of Micromachining to Sensors.
The Journal of The Institute of Electrical Engineers of Japan, 1997openaire +1 more source
A review on process capabilities of electrochemical micromachining and its hybrid variants
International Journal of Machine Tools and Manufacture, 2018Krishna Kumar Saxena +2 more
exaly
Dynamics of ultra-high-speed (UHS) spindles used for micromachining
International Journal of Machine Tools and Manufacture, 2014Bekir Bediz +2 more
exaly
A multiprocess machine tool for compound micromachining
International Journal of Machine Tools and Manufacture, 2010A B M A Asad, Tanveer Saleh, Y S Wong
exaly
Switchable Magnetic Metamaterials Using Micromachining Processes
Advanced Materials, 2011A Q Liu, Din Ping Tsai, Tarik Bourouina
exaly

