Results 251 to 252 of about 15,564 (252)
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Micromachining
1995
openaire
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(10.1016/b978-0-12-237070-0.50013-3)
openaccessbutton.org (pdf)
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Micromachining
2003
openaire
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(10.1201/9780203011508-14)
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マイクロマシン
7. clean energy
センサ
マイクロマシニング
glass
miniaturization
mems
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