Results 71 to 80 of about 34,809 (218)

Inchworm Motors and Beyond: A Review on Cooperative Electrostatic Actuator Systems

open access: yesActuators, 2023
Having benefited from technological developments, such as surface micromachining, high-aspect-ratio silicon micromachining and ongoing miniaturization in complementary metal–oxide–semiconductor (CMOS) technology, some electrostatic actuators became ...
Almothana Albukhari, Ulrich Mescheder
doaj   +1 more source

High-performance condenser microphone with fully integrated CMOS amplifier and DC-DC voltage converter [PDF]

open access: yes, 1998
The development of a capacitive microphone with an integrated detection circuit is described. The condenser microphone is made by micromachining of polyimide on silicon.
Bergveld, Piet   +2 more
core   +2 more sources

Large‐Scale and Cost‐Effective Fabrication of Ultra‐Thin, Biodegradable Microelectrode Arrays and Pressure Sensors Using Laser Micromachining

open access: yesAdvanced Materials Technologies, EarlyView.
A mask‐free and cost‐effective UV‐pico‐second laser‐based microfabrication method is proposed to fabricate large‐area biodegradable microelectrode arrays and pressure sensors. These devices demonstrate low impedance, good conformability, excellent biocompatibility, and rapid degradation, providing a new route for next‐generation transient electronics ...
Bhavani Prasad Yalagala   +5 more
wiley   +1 more source

The Capabilities of Spark-Assisted Chemical Engraving: A Review

open access: yesJournal of Manufacturing and Materials Processing, 2020
Brittle non-conductive materials, like glass and ceramics, are becoming ever more significant with the rising demand for fabricating micro-devices with special micro-features.
Zahraa Bassyouni, Jana D. Abou Ziki
doaj   +1 more source

Fabrication of (111)-Faced Single-Crystal Diamond Plates by Laser Nucleated Cleaving

open access: yes, 2017
Single-crystal diamond plates with surfaces oriented in a (111) crystal plane are required for high-performance solid-state device platforms ranging from power electronics to quantum information processing architectures.
Bassett, Lee C.   +3 more
core   +1 more source

Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies [PDF]

open access: yes, 1993
The development of micromachining techniques to create silicon-based waveguide circuits, which can operate up to high submillimeter-wave frequencies, is reported. As a first step, a WR-10 waveguide has been fabricated from (110) silicon wafers. Insertion
McGrath, William R.   +3 more
core   +1 more source

Smart Closed‐Loop Systems in Personalized Healthcare: Advances and Outlook

open access: yesAdvanced Materials Technologies, EarlyView.
A smart closed‐loop e‐textile integrates multimodal sensing, onboard processing, wireless communication, and wearable power to enable real‐time physiological/biochemical monitoring and feedback‐controlled therapy. ABSTRACT Smart textiles represent a revolutionary frontier in healthcare, seamlessly blending fabric and advanced technologies to create ...
Safoora Khosravi   +12 more
wiley   +1 more source

Monolithic optofluidic chips: from optical manipulation of single cells to quantum sensing of fluids [PDF]

open access: yes, 2014
This paper was presented at the 4th Micro and Nano Flows Conference (MNF2014), which was held at University College, London, UK. The conference was organised by Brunel University and supported by the Italian Union of Thermofluiddynamics, IPEM, the ...
4th Micro and Nano Flows Conference (MNF2014)   +1 more
core  

Direct Laser Writing of Magnetic Micro Actuators With a Stimulus‐Responsive Compliant Hinge

open access: yesAdvanced Materials Technologies, EarlyView.
This study presents a versatile modular design strategy for adaptive 3D microactuators. Using two‐photon‐induced C,H insertion reactions within solid polymer layers, chemically distinct hinge and stimulus responsive materials are patterned in one step. The hinge's properties enable tunable motion, mechanical control, and reconfigurable actuation across
Eleonora Galli   +4 more
wiley   +1 more source

Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining

open access: yesMicromachines, 2014
Femtosecond laser micromachining has emerged in recent years as a new technique for micro/nano structure fabrication because of its applicability to virtually all kinds of materials in an easy one-step process that is scalable. In the past, much research
K. M. Tanvir Ahmmed   +2 more
doaj   +1 more source

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