Results 1 to 10 of about 93 (81)

Design and Implementation of a Micromechanical Silicon Resonant Accelerometer [PDF]

Sensors, 2013
The micromechanical silicon resonant accelerometer has attracted considerable attention in the research and development of high-precision MEMS accelerometers because of its output of quasi-digital signals, high sensitivity, high resolution, wide dynamic ...
Libin Huang, Jinxing Liang, Yang Gao
exaly   +6 more sources

Structural Design and Testing of a Micromechanical Resonant Accelerometer

Micromachines, 2022
Micromechanical resonant accelerometers based on electrostatic stiffness have the advantage of it being possible to adjust their sensitivity by changing the detection voltage.
Heng Liu
exaly   +5 more sources

Sensitivity improvement techniques for micromechanical vibrating accelerometers [PDF]

MATEC Web of Conferences, 2016
The paper presents the problems of detecting a desired signal generated by micromechanical vibrating accelerometer. Three detection methods, namely frequency, amplitude and phase are considered in this paper.
Vtorushin Sergey, Nesterenko Tamara
doaj   +3 more sources

A passive acceleration sensor with mechanical 6 bit memory and mechanical analog-to-digital converter

Micro and Nano Engineering, 2022
This paper presents the design, modeling, fabrication and characterization of a passive micromechanical acceleration sensor intended for condition monitoring.
Philip Schmitt, Martin Hoffmann
doaj   +1 more source

Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer

Micromachines, 2022
There is mutual coupling between amplitude control and frequency tracking control in the closed-loop control of micromechanical resonant sensors, which restricts sensor performance.
Heng Liu, Jiale Wu, Yu Zhang
doaj   +1 more source

Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer

Micromachines, 2022
In this study, a dynamic equation for a micromechanical resonant accelerometer based on electrostatic stiffness is analyzed, and the parameters influencing sensitivity are obtained.
Heng Liu, Yu Zhang, Jiale Wu
doaj   +1 more source

Optimizing the Design of Surface-Acoustic-Wave Ring Resonator by Changing the Interdigitated Transducer Topology

Известия высших учебных заведений России: Радиоэлектроника, 2021
Introduction. Previous works considered the frequency characteristics and methods for fixing sensitive elements in the form of a wave ring resonator on surface acoustic waves in a housing made of various materials, as well as the influence of external ...
S. Yu. Shevchenko, D. A. Mikhailenko, B. Nyamweru   +2 more
doaj   +1 more source

Mathematical model of capacitance micromechanical accelerometer in static and dynamic operating modes

Қарағанды университетінің хабаршысы. Физика сериясы, 2020
Monitoring and early diagnosis systems, on which the protection function of both hydroturbines and auxiliary power equipment rely, are becoming increasingly relevant.
В.Ф. Граняк, В.В. Кухарчук, В.Ю. Кучерук, С.Ш. Кацыв, Д.Ж. Карабекова, А.К. Хасенов   +5 more
doaj   +1 more source

Turntable IMU Calibration Algorithm Based on the Fourier Transform Technique

Sensors, 2023
The paper suggests a new approach to calibration of a micromechanical inertial measurement unit. The data are collected on a simple rotating turntable with horizontal (or close to) rotation axis.
Yury Bolotin, Vladimir Savin
doaj   +1 more source

Optimal Overall Dimensions of a Surface Acoustic Waves Ring Resonator

Известия высших учебных заведений России: Радиоэлектроника, 2023
Introduction. In previous works, the authors considered the frequency characteristics of sensitive elements made of various materials in the form of a ring resonator on surface acoustic waves (SAW), along with their fixing methods in the housing, the ...
S. Yu. Shevchenko, D. A. Mikhailenko
doaj   +1 more source