The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure. [PDF]
Sensors (Basel), 2023 Zhou R +9 more
europepmc +1 more source
On the Implementation of a Micromachining Compatible MOEMS Tri-Axial Accelerometer
ChipsOn-chip optical accelerometers can be a promising alternative to capacitive, piezo-resistive, and piezo-electric accelerometers in some applications due to their immunity to electromagnetic interference and high sensitivity, which allow for robust ...
Ahmed Hamouda Elsayed +4 more
doaj +1 more source
Tuneable Dual-Mode Micro-Resonator Associating Photonic Crystal Membrane and Fabry–Perot Cavity
IEEE Photonics Journal, 2014 We report on a tuneable dual-wavelength micro-resonator with a resonant photonic crystal membrane (PCM) inserted in a vertical Fabry-Perot (FP) cavity. Strong optical coupling between both resonators leads to dual-wavelength resonances.
K. Kusiaku +3 more
doaj +1 more source
Improving the Resolution and Throughput of Achromatic Talbot Lithography
, 2018 High-resolution patterning of periodic structures over large areas has several applications in science and technology. One such method, based on the long-known Talbot effect observed with diffraction gratings, is achromatic Talbot lithography (ATL). This
Ekinci, Yasin +2 more
core
Design and Simulation Study of an Optical Mode-Localized MEMS Accelerometer. [PDF]
Micromachines (Basel), 2022 Feng Y, Yang W, Zou X.
europepmc +1 more source
Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors. [PDF]
Micromachines (Basel), 2022 Stoeckel C +7 more
europepmc +1 more source
Guangtongxin yanjiu, 2003 文章比较全面地综述了近几年来各种光开关技术的研究进展 ,包括微光机电系统（ MOEMS）技术、气泡技术、液晶技术、全息光栅技术、热光技术及声光技术等 ,并详细分析了各种技术相应的发展状况 ...
马慧莲
doaj
Editorial for Special Issue "Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices". [PDF]
Micromachines (Basel), 2023 Žukauskaitė A.
europepmc +1 more source
Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon
Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structures are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide.
Baumberg, J.J. +7 more
core
MEMS On/off and x2 Optical Switch with Integrated Fiber Alignment Capability [PDF]
, 2004 An on/off free space optical switch is described in this paper. The device consists of intersecting cantilevers and is electrostatically actuated.
Cheah, Wei Leow, Mohammad, A .B.
core