Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator [PDF]
Sensors, 2020 In this paper, the characterization of a whispering gallery mode (WGM) resonator applied in a novel micro-opto-electro-mechanical system (MOEMS) gyroscope was investigated.
Dunzhu Xia, , Bing Zhang
exaly +8 more sources
A New Design of an MOEMS Gyroscope Based on a WGM Microdisk Resonator [PDF]
Sensors, 2019 In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS) gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS resonator.
Dunzhu Xia, Liye Zhao, Xia Dunzhu
exaly +8 more sources
Research on the Disc Sensitive Structure of a Micro Optoelectromechanical System (MOEMS) Resonator Gyroscope [PDF]
Micromachines, 2019 A micro optoelectromechanical system (MOEMS) resonator gyroscope based on a waveguide micro-ring resonator was proposed. This sensor was operated by measuring the shift of the transmission spectrum.
Dunzhu Xia, Liye Zhao, Xiang Shen
exaly +8 more sources
MEMS and MOEMS Gyroscopes: A Review
Photonic Sensors, 2023 Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-mechanical system (MOEMS) are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS ...
Guang-Wei Deng +2 more
exaly +4 more sources
Correction: Shen, X. et al. Research on the Disc Sensitive Structure of a Micro Optoelectromechanical System (MOEMS) Resonator Gyroscope. Micromachines, 2019, 10, 264 [PDF]
Micromachines, 2019 In the published paper [...]
Xiang Shen, Liye Zhao, Dunzhu Xia
doaj +6 more sources
International Journal of OptomechatronicsMost micro-electromechanical systems (MEMS) gyroscopes use capacitive detection to sense displacement from angular velocity, but parasitic capacitance and electromagnetic interference limit precision.
Jamal N. A. Hassan +10 more
exaly +5 more sources
Micro-clamps for precise positioning of 120° silicon double mirrors in a MOEMS gyroscope [PDF]
Microelectronic Engineering, 2016 Publications Institute of Microtechnology ...
Andreas Dietzel
exaly +5 more sources
A Comprehensive Review on the Optical Micro-Electromechanical Sensors for the Biomedical Application [PDF]
Frontiers in Public Health, 2021 This study presented an overview of current developments in optical micro-electromechanical systems in biomedical applications. Optical micro-electromechanical system (MEMS) is a particular class of MEMS technology.
Anup M. Upadhyaya +11 more
doaj +2 more sources
Reliability and Fatigue Analysis in Cantilever‐Based MEMS Devices Operating in Harsh Environments
Journal of Quality and Reliability Engineering, Volume 2014, Issue 1, 2014., 2014 The microelectromechanical system (MEMS) is one of the most diversified fields of microelectronics; it is rated to be the most promising technology of modern engineering. MEMS can sense, actuate, and integrate mechanical and electromechanical components of micro‐ and nano sizes on a single silicon substrate using microfabrication techniques.
Mohammad Tariq Jan +5 more
wiley +1 more source
Modeling and Formulation of a Novel Microoptoelectromechanical Gyroscope
Journal of Nanomaterials, Volume 2008, Issue 1, 2008., 2008 This paper proposed a novel design of microgyroscope based on MEMS structures and optic interferometric microdisplacement measurement technique. The gyroscope consists of microvibrator and interferometric readout. Using Coriolis force, the vibrator transfers the system rotation into a forced vibration; the induced vibration can be sensed by the ...
Bohua Sun +3 more
wiley +1 more source