Design and Development of a MOEMS Accelerometer Using SOI Technology [PDF]
Micromachines, 2023 The micro-electromechanical system (MEMS) sensors are suitable devices for vibrational analysis in complex systems. The Fabry–Pérot interferometer (FPI) is used due to its high sensitivity and immunity to electromagnetic interference (EMI).
Rafael Gonzalez-Landaeta +2 more
exaly +4 more sources
Wideband MOEMS for the Calibration of Optical Readout Systems [PDF]
Sensors, 2021 The paper proposes a technology based on UV-LIGA process for microoptoelectromechanical systems (MOEMS) manufacturing. We used the original combination of materials and technological steps, in which any of the materials does not enter chemical reactions ...
Daniil Semikov, Petr Volkov
exaly +4 more sources
Research on the Disc Sensitive Structure of a Micro Optoelectromechanical System (MOEMS) Resonator Gyroscope [PDF]
Micromachines, 2019 A micro optoelectromechanical system (MOEMS) resonator gyroscope based on a waveguide micro-ring resonator was proposed. This sensor was operated by measuring the shift of the transmission spectrum.
Dunzhu Xia, Liye Zhao, Xiang Shen
exaly +4 more sources
Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings [PDF]
Micromachines, 2023 An ultrasensitive single-axis in-plane micro-optical-electro-mechanical-system (MOEMS) accelerometer based on the Talbot effect of dual-layer gratings is proposed.
Wenqing Chen +4 more
doaj +2 more sources
Dosimetry with gafchromic films based on a new micro-opto-electro-mechanical system [PDF]
Scientific Reports, 2021 This work presents the first tests performed with radiochromic films and a new Micro‒Opto‒Electro-Mechanical system (MOEMS) for in situ dosimetry evaluation in radiotherapy in real time.
C. Guardiola +5 more
doaj +2 more sources
Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review [PDF]
MicromachinesHigh-precision displacement sensing has been widely used across both scientific research and industrial applications. The recent interests in developing micro-opto-electro-mechanical systems (MOEMS) have given rise to an excellent platform for ...
Chenguang Xin +3 more
doaj +2 more sources
Piezoelectric Thin-Film Actuator for Dynamic Tuning of Micro-Optical Cavities [PDF]
MicromachinesIn micro-opto-electro-mechanical systems (MOEMS), the micro-optical cavity plays a pivotal role. As performance requirements for MOEMS devices continue to rise, these cavities must achieve higher performance levels while simultaneously reducing their ...
Dehua Tan +8 more
doaj +2 more sources
Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator [PDF]
Sensors, 2020 In this paper, the characterization of a whispering gallery mode (WGM) resonator applied in a novel micro-opto-electro-mechanical system (MOEMS) gyroscope was investigated.
Dunzhu Xia, Bing Zhang, Hao Wu, Tao Wu
doaj +2 more sources
MEMS and MOEMS Gyroscopes: A Review
Photonic Sensors, 2023 Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-mechanical system (MOEMS) are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS ...
Wenyi Huang +9 more
doaj +2 more sources
Study on a Two-Dimensional Scanning Micro-Mirror and Its Application in a MOEMS Target Detector
Sensors, 2010 A two-dimensional (2D) scanning micro-mirror for target detection and measurement has been developed. This new micro-mirror is used in a MOEMS target detector to replace the conventional scanning detector.
Zheng You, Chi Zhang, You Zheng
exaly +3 more sources