Folded flexure MOEMS for the detection of PSA and hepatitis DNA as biosensor for prostate cancer and viruses [PDF]
Scientific ReportsMicro-opto-electro-mechanical systems (MOEMS) biosensors are employed in various applications such as disease monitoring, drug investigation, detection of pollutants, and biological fluid studies.
Hossein Bahramian +2 more
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Procedia Engineering, 2012 AbstractIn this paper, a novel polymer MOEMS (Micro-Opto-Electro-Mechanical Systems) accelerometer is reported on. Low cost, photopatternable epoxies, EpoClad and EpoCore, are UV exposed by lithography to form this accelerometer in a simple and robust fabrication process.
Robert Puers, T Guan
exaly +2 more sources
Design and Modification of a High-Resolution Optical Interferometer Accelerometer [PDF]
Sensors, 2021 The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism ...
Yuan Yao +8 more
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A μGal MOEMS gravimeter designed with free-form anti-springs [PDF]
Nature CommunicationsGravimeter measures gravitational acceleration, which is valuable for geophysical applications such as hazard forecasting and prospecting. Gravimeters have historically been large and expensive instruments.
Shuang Wu +14 more
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Opto-Mechanical Integrated Analysis of Micro-Vibration Effects on the Imaging Performance of a Precision Optical System [PDF]
MicromachinesTo explore the influence of reaction wheel perturbations on the image quality of a space optical telescope, a comprehensive dynamic model of a precision optical system was established, and an optical-mechanical integrated analysis approach was adopted to
Ruijing Liu +3 more
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Optimization of MOEMS Projection Module Performance with Enhanced Piezoresistive Sensitivity [PDF]
Micromachines, 2020 In scanning laser projection systems, the laser modulation time is important for the projection resolution. The modulation time needs to be matched with the motion of the micromirror.
Huijun Yu +4 more
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Scanning Micromirror Calibration Method Based on PSO-LSSVM Algorithm Prediction [PDF]
MicromachinesScanning micromirrors represent a crucial component in micro-opto-electro-mechanical systems (MOEMS), with a broad range of applications across diverse fields.
Yan Liu +5 more
doaj +2 more sources
A New Design of an MOEMS Gyroscope Based on a WGM Microdisk Resonator [PDF]
Sensors, 2019 In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS) gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS resonator.
Dunzhu Xia, Lingchao Huang, Liye Zhao
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Synthetic nano-kirigami with high deformability for reconfigurable information displays [PDF]
Nature CommunicationsTransformable micro/nanostructures endow optical and mechanical metamaterials with customization and tunability. However, employing existing transformation mechanisms to achieve large mechanical deformations remains challenging due to the restricted ...
Xiaorong Hong +15 more
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Review of micromachined optical accelerometers: from mg to sub-μg
Opto-Electronic Advances, 2021 Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume and anti-electromagnetic ...
Qianbo Lu +5 more
doaj +1 more source