Design and Modification of a High-Resolution Optical Interferometer Accelerometer [PDF]
Sensors, 2021 The Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer that combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume, and anti-electromagnetism ...
Yuan Yao +8 more
doaj +2 more sources
Folded flexure MOEMS for the detection of PSA and hepatitis DNA as biosensor for prostate cancer and viruses [PDF]
Scientific ReportsMicro-opto-electro-mechanical systems (MOEMS) biosensors are employed in various applications such as disease monitoring, drug investigation, detection of pollutants, and biological fluid studies.
Hossein Bahramian +2 more
doaj +2 more sources
A μGal MOEMS gravimeter designed with free-form anti-springs [PDF]
Nature CommunicationsGravimeter measures gravitational acceleration, which is valuable for geophysical applications such as hazard forecasting and prospecting. Gravimeters have historically been large and expensive instruments.
Shuang Wu +14 more
doaj +2 more sources
Study on a Two-Dimensional Scanning Micro-Mirror and Its Application in a MOEMS Target Detector
Sensors, 2010 A two-dimensional (2D) scanning micro-mirror for target detection and measurement has been developed. This new micro-mirror is used in a MOEMS target detector to replace the conventional scanning detector.
Chi Zhang
exaly +3 more sources
Optimization of MOEMS Projection Module Performance with Enhanced Piezoresistive Sensitivity [PDF]
Micromachines, 2020 In scanning laser projection systems, the laser modulation time is important for the projection resolution. The modulation time needs to be matched with the motion of the micromirror.
Huijun Yu +4 more
doaj +2 more sources
Scanning Micromirror Calibration Method Based on PSO-LSSVM Algorithm Prediction [PDF]
MicromachinesScanning micromirrors represent a crucial component in micro-opto-electro-mechanical systems (MOEMS), with a broad range of applications across diverse fields.
Yan Liu +5 more
doaj +2 more sources
Editorial for the Special Issue on Optical MEMS [PDF]
Micromachines, 2019 Optical micro-electro-mechanical systems (MEMS), micro-opto-electro-mechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micron or millimeter scale [...]
Huikai Xie, Frederic Zamkotsian
doaj +2 more sources
Synthetic nano-kirigami with high deformability for reconfigurable information displays [PDF]
Nature CommunicationsTransformable micro/nanostructures endow optical and mechanical metamaterials with customization and tunability. However, employing existing transformation mechanisms to achieve large mechanical deformations remains challenging due to the restricted ...
Xiaorong Hong +15 more
doaj +2 more sources
Review of micromachined optical accelerometers: from mg to sub-μg
Opto-Electronic Advances, 2021 Micro-Opto-Electro-Mechanical Systems (MOEMS) accelerometer is a new type of accelerometer which combines the merits of optical measurement and Micro-Electro-Mechanical Systems (MEMS) to enable high precision, small volume and anti-electromagnetic ...
Qianbo Lu +5 more
doaj +1 more source
Closed-loop MOEMS accelerometer
Optics Express, 2022 In this paper, a closed-loop micro-opto-electro-mechanical system (MOEMS) accelerometer based on the Fabry-Pérot (FP) interferometer is presented. The FP cavity is formed between the end of a cleaved single-mode optical fiber and the cross-section of a proof mass (PM) which is suspended by four U-shaped springs.
Majid Taghavi +6 more
openaire +3 more sources