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Structural design and simulation of a MOEMS gyroscope based on subwavelength grating detection

Applied Optics
A novel, to the best of our knowledge, out-of-plane microelectromechanical system (MOEMS) gyroscope based on Wood’s type anomaly utilizing a subwavelength grating pair has been proposed. Based on this anomalous diffraction phenomenon, tiny changes in the displacement of the nanostructured grating elements lead to a dramatic ...
RuoXi Li   +6 more
exaly   +3 more sources

Designing of a MOEMS Gyroscope Based on an Asymmetric-Grating Hybrid-Plasmonic ROC

Arabian Journal for Science and Engineering, 2023
Kambiz Abedi, Abedi Kambiz
exaly   +2 more sources

High-sensitivity MOEMS gyroscope utilizing the sub-wavelength grating–waveguide mode coupling effect

Applied Optics
Micro-electro-mechanical system (MEMS) gyroscopes based on the Coriolis principle have numerous potential applications, including industrial automation, motion control, inertial navigation, and automotive systems. In this paper, we present a novel (to our knowledge) micro-opto-electro-mechanical system (MOEMS) gyroscope design based on the grating ...
Li Jin   +6 more
openaire   +2 more sources

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