Design of a tri-axial surface micromachined MEMS vibrating gyroscope [PDF]
, 2020 Gyroscopes are one of the next killer applications for the MEMS (Micro-Electro-Mechanical-Systems) sensors industry. Many mature applications have already been developed and produced in limited volumes for the automotive, consumer, industrial, medical ...
Balucani, Marco +3 more
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, 2015 International audienceThis paper reports on an original architecture of microfabricated alkali vapor cell designed for miniature atomic clocks. The cell combines diffraction gratings with anisotropically etched single-crystalline silicon sidewalls to ...
Abbé, Philippe +9 more
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Disc resonator gyroscope fabrication process requiring no bonding alignment [PDF]
, 2010 A method of fabricating a resonant vibratory sensor, such as a disc resonator gyro. A silicon baseplate wafer for a disc resonator gyro is provided with one or more locating marks. The disc resonator gyro is fabricated by bonding a blank resonator wafer,
Shcheglov, Kirill V.
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National MEMS Technology Roadmap - Markets, Applications and Devices [PDF]
, 2012 MEMS teknologiaa on jo pitkään käytetty lukuisien eri laitteiden valmistamiseen. Osa näistä laitteista on ollut markkinoilla jo useita vuosia, kun taas osa on vasta kehitysvaiheessa.
Lampo, Susanna
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Accelerated life tests for prognostic and health management of MEMS devices. [PDF]
, 2014 International audienceMicroelectromechanical systems (MEMS) offer numerous applications thanks to their miniaturization, low power consumption and tight integration with control and sense electronics.
Medjaher, Kamal +2 more
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MEMS micro-contact printing engines
, 2011 This thesis investigates micro-contact printing (µCP) engines using micro-electro-mechanical systems (MEMS). Such engines are self-contained and do not require further optical alignment and precision manipulation equipment.
Choonee, Kaushal R V +1 more
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Tuning of 2D rod-type photonic crystal cavity for optical modulation and impact sensing [PDF]
, 2019 We propose a novel way of mechanical perturbation of photonic crystal cavities for on-chip applications. We utilize the equivalence of the 2D photonic crystals with perfect electric conductor (PEC) boundary conditions to the infinite height 3D ...
Erdil, Mertcan +5 more
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Dual-Mass MEMS Gyroscope Structure, Design, and Electrostatic Compensation [PDF]
, 2018 Dual-mass MEMS gyroscope is one of the most popular inertial sensors. In this chapter, the structure design and electrostatic compensation technology for dual-mass MEMS gyroscope is introduced.
Cao, Huiliang, Li, Jianhua
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A novel MOEMS gyroscope based on a two-dimensional photonic crystal array
Microsystem TechnologiesAbstract Currently, most MEMS (Micro-electromechanical systems) gyroscopes use capacitive detection solution to measure the displacement due to angular velocity for its simplicity. However, this method has many unavoidable errors which will decrease the gyroscopes’ precision, such as parasitic capacitance, electromagnetic interference. Recently,
Jinhui Li +3 more
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CUSTARD (Cranfield University Space Technology Advanced Research Demonstrator) - A Micro-System Technology Demonstrator Nanosatellite. Summary of the Group Design Project MSc in Astronautics and Space Engineering. 1999-2000, Cranfield University [PDF]
, 2003 CUSTARD (Cranfield University Space Technology And Research Demonstrator) was the group design project for students of the MSc in Astronautics and Space Engineering for the Academic Year 1999/2000 at Cranfield University. The project involved the initial
Hobbs, Stephen, Turner, Ray
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