Results 21 to 30 of about 84 (41)
Opto-Mechanical Integrated Analysis of Micro-Vibration Effects on the Imaging Performance of a Precision Optical System. [PDF]
Micromachines (Basel)Liu R, Liang Z, Zhang Y, Li Q.
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Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review. [PDF]
Micromachines (Basel)Xin C, Xu Y, Zhang Z, Li M.
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Design of an integrable double-sided optoplasmonic gyroscope via a bent hybrid structure. [PDF]
Sci RepGholinejad J, Abedi K.
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Nanophotonic Materials and Devices: Recent Advances and Emerging Applications. [PDF]
Micromachines (Basel)Chou Chau YF.
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MOEMS gyroscope based on acoustooptic mode coupling
Optical Sensors and Biophotonics II, 2010 A novel structure of Micro-Optic-Electro-Mechanical-System (MOEMS) gyroscope was designed. Optical waveguide diffractive component, electro-optical modulator and Surface Acoustic Wave (SAW) sensor etc. were integrated on a XY LiNbO3 substrate. The obtained sensitivity was 12 uVdeg−1s−1 in the angular rate range of 0 –400deg/s.
Shu-xiang Lu, Shu-fen Chen, Yi Zhao
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Research on angle actuator of spatial resonance MOEMS gyroscope
Proceedings of SPIE, 2008 A novel actuator of small angle control is researched and designed in this paper, which can be used in micro optical electro-mechanical system (MOEMS) gyroscope. This actuator is composed of three pieces of piezoelectric ceramics (PZT), foundation base and gear frame.
Lishuang Feng
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Investigation and analysis of a MOEMS gyroscope based on novel resonator
2010 Academic Symposium on Optoelectronics and Microelectronics Technology and 10th Chinese-Russian Symposium on Laser Physics and Laser TechnologyOptoelectronics Technology (ASOT), 2010 In this paper, a micro-optical-electro-mechanical system (MOEMS) gyroscope was developed taking a new optical microcavity — planar microdisk cavity as the core sensing element. The planar microdisk cavity was designed with high Q value and small volume, and the processing technology of the planar microdisk cavity was discussed in detail with the micro ...
Zhao Min +6 more
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Research on a novel MOEMS interferometric gyroscope
SPIE Proceedings, 2006 MOEMS (Micro-Opto-Electro-Mechanical System) gyroscope is one of the research hotspot of international inertial domain. It combines advantages of optical detect principle of optical gyroscopes and MEMS (Micro-Electro-Mechanical System) fabrication technique. It is solid-state.
Lishuang Feng, Chunxi Zhang
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Fabrication and Characterization of an MOEMS Gyroscope Based on Photonic Bandgap Materials
IEEE Transactions on Instrumentation and Measurement, 2016This paper focuses on a micro-optoelectro-mechanical vibratory gyroscope that provides an optical output and operates in a resonant condition. A custom fabrication technology, based on a silicon-on-insulator substrate, has been considered for the development of the inertial sensor.
Carlo Trigona, Salvatore Baglio
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IEEE Sensors Journal, 2019
In this paper, a novel vibratory optical MEMS gyroscope is proposed, which is composed of an optical sensing system, an electrostatic comb-drive actuator, and a mass-spring system with 2 degrees of freedom and a decoupling frame. The optical sensing system consists of a laser diode light source, a tunable photonic crystal, a photodetector, and ...
Kambiz Abedi, Kian Jafari
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In this paper, a novel vibratory optical MEMS gyroscope is proposed, which is composed of an optical sensing system, an electrostatic comb-drive actuator, and a mass-spring system with 2 degrees of freedom and a decoupling frame. The optical sensing system consists of a laser diode light source, a tunable photonic crystal, a photodetector, and ...
Kambiz Abedi, Kian Jafari
exaly +2 more sources