Miniaturized NIR Spectrometer Based on Novel MOEMS Scanning Tilted Grating
Micromachines, 2018 This paper presents a dispersive near-infrared spectrometer with features of miniaturization, portability and low cost. The application of a resonantly-driven scanning grating mirror (SGM) as a dispersive element in a crossed Czerny–Turner ...
Jian Huang +5 more
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Operation of a MOEMS Deformable Mirror in Cryo: Challenges and Results
Micromachines, 2017 Micro-opto-electro-mechanical systems (MOEMS) Deformable Mirrors (DM) are key components for next generation optical instruments implementing innovative adaptive optics systems, both in existing telescopes and in the future ELTs.
Frederic Zamkotsian +5 more
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A Novel MOEMS NIR Spectrometer
Physics Procedia, 2011 AbstractIn order to detect luminous intensity of light signal in NIR (Near-infrared) wavelength range, a novel MOEMS(Micro-Opto-Electro-Mechanical Systems) NIR spectrometer is proposed in the paper. It uses DMD (Digital Micro-mirror Device) to band filter the input spectrum. The merits of DMD are small size, low price and high scan speed.
Zhihai, Zhang +3 more
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A Near-Infrared Spectrometer Based on Novel Grating Light Modulators
Sensors, 2009 A near-infrared spectrometer based on novel MOEMS grating light modulators is proposed. The spectrum detection method that combines a grating light modulator array with a single near-infrared detector has been applied.
Weimin Chen +5 more
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On the Implementation of a Micromachining Compatible MOEMS Tri-Axial Accelerometer
ChipsOn-chip optical accelerometers can be a promising alternative to capacitive, piezo-resistive, and piezo-electric accelerometers in some applications due to their immunity to electromagnetic interference and high sensitivity, which allow for robust ...
Ahmed Hamouda Elsayed +4 more
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The Performance Characterization and Optimization of Fiber-Optic Acoustic Pressure Sensors Based on the MOEMS Sensitized Structure. [PDF]
Sensors (Basel), 2023 Zhou R +9 more
europepmc +1 more source
Guangtongxin yanjiu, 2003 文章比较全面地综述了近几年来各种光开关技术的研究进展 ,包括微光机电系统（ MOEMS）技术、气泡技术、液晶技术、全息光栅技术、热光技术及声光技术等 ,并详细分析了各种技术相应的发展状况 ...
马慧莲
doaj
Design and Simulation Study of an Optical Mode-Localized MEMS Accelerometer. [PDF]
Micromachines (Basel), 2022 Feng Y, Yang W, Zou X.
europepmc +1 more source
Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors. [PDF]
Micromachines (Basel), 2022 Stoeckel C +7 more
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Editorial for Special Issue "Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices". [PDF]
Micromachines (Basel), 2023 Žukauskaitė A.
europepmc +1 more source