Results 71 to 80 of about 6,247 (204)
IEEJ Transactions on Electrical and Electronic Engineering, Volume 19, Issue 5, Page 767-772, May 2024.This paper reports the development and integration of (Poly‐Si/Air)n Distributed BRAGG Reflectors (DBR) in a MOEMS Fabry‐Pérot‐Interferometer (FPI) concept. The realized reflectors constitute a promising and resource‐efficient alternative to complex Ion‐Assisted Deposition based DBRs while maintaining their advantages.
Christian Helke +10 more
wiley +1 more source
Optimization of an electret-based energy harvester
, 2011 Thanks to miniaturisation, it is today possible to imagine self-powered systems that use vibrations to produce their own electrical energy. Many energy-harvesting systems already exist. Some of them are based on the use of electrets: electrically charged
Boisseau, S. +2 more
core +1 more source
MATEC Web of Conferences, 2015 In future space missions for Universe and Earth Observation, scientific return could be optimized using MOEMS devices. Micro-mirror arrays are used for designing new generation of instruments, multi-object spectrographs in Universe Observation and ...
Zamkotsian Frederic +4 more
doaj +1 more source
Review on Metasurfaces: An Alternative Approach to Advanced Devices and Instruments
Advanced Devices & Instrumentation, 2022 This paper reviews the-state-of-the-art of electromagnetic (EM) metasurfaces and emergent applications in advanced integrated devices and instruments from the design method to physical implementation.
Xiaoguang Zhao +7 more
doaj +1 more source
Effects of imperfect angular adjustment on plasmonic force
, 2017 The attractive plasmon force between two metallic walls when the electromagnetic wave propagates through a narrow slit has been studied earlier for parallel plates and normal incidence.
Belai, Oleg +3 more
core +1 more source
Design and Performance Analysis of Capacitive Micromachined Ultrasonic Transducer Linear Array
Micromachines, 2014 An ultrasonic transducer is a key component to achieve ultrasonic imaging. This paper designs a new type of Microelectromechanical Systems (MEMS) based capacitive ultrasonic transducer and a linear array based on the transducer.
Hongliang Wang +3 more
doaj +1 more source
MOEMS Based Single Chip Lorentz Force Magnetic Gradiometer
Proceedings, 2018 The functional principle of an optical gradient magnetic field sensor consisting of two independent laterally oscillating masses on a single chip is reported.
Matthias Kahr +7 more
doaj +1 more source
Design and Modeling of Fiber-Free Optical MEMS Accelerometer Enabling 3D Measurements
Micromachines, 2022 Optical accelerometers are popular in some applications because of their better immunity to electromagnetic interference, and they are often more sensitive than other accelerometer types.
Samir Abozyd +2 more
doaj +1 more source
Materials modeling and development for use in double-exposure lithography applications [PDF]
, 2009 The current optical photolithography technology is approaching the physical barrier to the minimum achievable feature size. To produce smaller devices, new resolution enhancement technologies must be developed.
Byers, Jeffrey +5 more
core +2 more sources
Digital mirror devices and liquid crystal displays in maskless lithography for fabrication of polymer-based holographic structures [PDF]
, 2015 Polymer-based holographic and diffractive optical elements have gained increasing interest due to their potential to be used in a broad range of applications, such as illumination technology, micro-optics, and holography.
Boroz, Kristian +7 more
core +2 more sources