Results 1 to 10 of about 1,591 (90)

Fabrication of Functional Microdevices in SU-8 by Multi-Photon Lithography [PDF]

Micromachines, 2021
This review surveys advances in the fabrication of functional microdevices by multi-photon lithography (MPL) using the SU-8 material system. Microdevices created by MPL in SU-8 have been key to progress in the fields of micro-fluidics, micro ...
Pooria Golvari, Stephen M. Kuebler
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High laser induced damage threshold photoresists for nano-imprint and 3D multi-photon lithography [PDF]

Nanophotonics, 2021
Optics manufacturing technology is predicted to play a major role in the future production of integrated photonic circuits. One of the major drawbacks in the realization of photonic circuits is the damage of optical materials by intense laser pulses ...
Kabouraki Elmina, Melissinaki Vasileia, Yadav Amit, Melninkaitis Andrius, Tourlouki Konstantina, Tachtsidis Theodoros, Kehagias Nikolaos, Barmparis Georgios D., Papazoglou Dimitris G., Rafailov Edik, Farsari Maria   +10 more
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Calcination-Enhanced Laser-Induced Damage Threshold of 3D Micro-Optics Made with Laser Multi-Photon Lithography [PDF]

Photonics, 2023
Laser Direct Writing (LDW), also known as 3D multi-photon laser lithography of resins, is a promising technique for fabricating complex free-form elements, including micro-optical functional components.
Darius Gailevicius, Rokas Zvirblis, Karolis Galvanauskas, Gintare Bataviciute, Mangirdas Malinauskas   +4 more
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λ/30 inorganic features achieved by multi-photon 3D lithography [PDF]

Nature Communications, 2022
Stereolithography has progressed over the years but resolution and feature size is still limited by the properties of materials and resins. Here, the authors demonstrate femtosecond laser direct writing of a hydrogen silsesquioxane photoresist using a ...
Feng Jin, Jie Liu, Yuan-Yuan Zhao, Xian-Zi Dong, Mei-Ling Zheng, Xuan-Ming Duan   +5 more
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Light and matter co-confined multi-photon lithography [PDF]

Nature Communications
Mask-free multi-photon lithography enables the fabrication of arbitrary nanostructures low cost and more accessible than conventional lithography. A major challenge for multi-photon lithography is to achieve ultra-high precision and desirable lateral ...
Lingling Guan, Chun Cao, Xi Liu, Qiulan Liu, Yiwei Qiu, Xiaobing Wang, Zhenyao Yang, Huiying Lai, Qiuyuan Sun, Chenliang Ding, Dazhao Zhu, Cuifang Kuang, Xu Liu   +12 more
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Ultra-high precision nano additive manufacturing of metal oxide semiconductors via multi-photon lithography

Nature Communications
As a basic component of the versatile semiconductor devices, metal oxides play a critical role in modern electronic information industry. However, ultra-high precision nanopatterning of metal oxides often involves multi-step lithography and transfer ...
Chun Cao, Xianmeng Xia, Xiaoming Shen, Xiaobing Wang, Zhenyao Yang, Qiulan Liu, Chenliang Ding, Dazhao Zhu, Cuifang Kuang, Xu Liu   +9 more
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Acousto-optic scanning multi-photon lithography with high printing rate

Opto-Electronic Advances
Acousto-optic scanning and spatial switching methods have revolutionized printing rate improvements for multi-photon lithography.
Minghui Hong
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3D multi-site hydrogen evolution reaction catalysts on nanoimprinted surfaces, structured via multi-photon lithography derived masks

Materials & Design
Efficient water splitting is a major challenge in green hydrogen production and energy transition. Thus, considerable scientific efforts are devoted to optimize surface geometries for enhancing the performance of water-splitting catalysts.
Alexander Jelinek, Daniela Neumüller, Christoph Gammer, Jürgen Eckert, Daniel Kiener   +4 more
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Probing local adhesion: A miniaturized multi-photon lithography design demonstrated on silanized vs. untreated surfaces

Materials & Design
As multi-photon lithography technology matures, advanced integrated device design concepts become possible, positioned onto small surfaces, such as optical fibres.
Alexander Jelinek, Elisabeth Rossegger, Sandra Schlögl, Daniel Kiener, Markus Alfreider   +4 more
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Author Correction: Light and matter co-confined multi-photon lithography [PDF]

Nature Communications
Lingling Guan, Chun Cao, Xi Liu, Qiulan Liu, Yiwei Qiu, Xiaobing Wang, Zhenyao Yang, Huiying Lai, Qiuyuan Sun, Chenliang Ding, Dazhao Zhu, Cuifang Kuang, Xu Liu   +12 more
doaj   +2 more sources