ILILT: Implicit Learning of Inverse Lithography Technologies [PDF]
Lithography, transferring chip design masks to the silicon wafer, is the most important phase in modern semiconductor manufacturing flow. Due to the limitations of lithography systems, Extensive design optimizations are required to tackle the design and silicon mismatch.
arxiv
Fabrication and Characterization of Ga2O3 FinFETs on Patterned Silicon Substrate
This study presents a Ga2O3‐based FinFET fabricated on a patterned silicon substrate using ALD. Electrical measurements reveal that post‐deposition annealing at 450 °C significantly improves the device performance, yielding a high Ion/Ioff ratio of 8.3 × 107, enhanced mobility of 8.5 cm2 V−1 s, and a breakdown voltage exceeding 200 V.
Hadi Ebrahimi‐Darkhaneh+4 more
wiley +1 more source
Direct Nanopatterning of Complex 3D Surfaces and Self-Aligned Superlattices via Molecular-Beam Holographic Lithography [PDF]
Conventional lithography methods involving pattern transfer through resist templating face challenges of material compatibility with various process solvents. Other approaches of direct material writing often compromise pattern complexity and overlay accuracy.
arxiv
Advanced Microfluidic‐Based Wearable Electrochemical Sensors for Continuous Biochemical Monitoring
Microfluidic‐based wearable electrochemical sensors are transforming non‐invasive health monitoring through real‐time biochemical analysis of sweat, saliva, and interstitial fluid. This review explores advances in microfluidic design, fabrication, and sensor integration while addressing biofluid variability, material compatibility, and scalability.
Sehyun Park+5 more
wiley +1 more source
Global Alignment Reference Strategy for Laser Interference Lithography Pattern Arrays [PDF]
Large-area gratings play a crucial role in various engineering fields. However, traditional interference lithography is limited by the size of optical component apertures, making large-area fabrication a challenging task. Here, a method for fabricating laser interference lithography pattern arrays with a global alignment reference strategy is proposed.
arxiv
Multifunctional Ultra‐Bright Plasmonic Gold@Fluorescence Nanoprobe for Biomedical Applications
Plasmonic gold nanoparticles (AuNPs) with intrinsic superiorities in metal‐enhanced fluorescence (MEF) have been widely utilized in amplifying signal enhancement, fluorescent labeling, and theranostics. This review systematically discusses plasmonic AuNPs‐driven MEFs, from their enhancement mechanisms, influencing factors, and enhanced types, to their ...
Caiping Ding+4 more
wiley +1 more source
Advances in 3D and 4D Printing of Soft Robotics and Their Applications
This article summarizes the development of 3D‐printed soft robotics in the recent decade. The article discusses the printing capabilities of different additive manufacturing technologies in terms of soft polymers, multimaterial printability, soft robotic printing, and 4D printing.
Hao Liu+5 more
wiley +1 more source
A Single‐Molecule Liposome Assay for Membrane Permeabilisation
Cell membrane disruption is associated with numerous diseases and underlies the activity of various antimicrobial agents. The rapid screening of compounds capable of disrupting or permeabilising biological membranes is essential to the search for new therapeutic drugs.
Krzysztof Marek Bąk+9 more
wiley +1 more source
Stimuli‐Configuring Anisotropic Soft Architectures towards Dynamic Manipulable Photonics
This review covers stimuli‐responsive liquid crystal micro/nano‐structures, focusing on their properties, advancements, and applications in photonics. It discusses electric, light, temperature, and mechanical stimuli, highlighting innovative applications in optics, sensing, information processing and so on so forth, emphasizing liquid crystal ...
Xiaoqian Wang, Zhi‐Gang Zheng
wiley +1 more source