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3D Freeform Millimeter-Wave and THz Structures Based on Multi-Photon Lithography
Optical Fiber Communication Conference (OFC) 2024We exploit high-resolution multi-photon lithography for fabricating 3D-freeform millimeter-wave and THz structures that overcome the limitations of conventional planar architectures. We demonstrate THz probes, suspended antennas, and ultra-broadband chip-
P. Maier +12 more
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Multi-photon lithography on thin films for efficient fabrication of 2D and 2.5D meta-atoms
2025 Nineteenth International Congress on Artificial Materials for Novel Wave Phenomena (Metamaterials)Direct laser writing (DLW) has arise interest in a variety of fields due to the capabilities that we get from the realization of 2D and 3D structures with high resolution fabrication techniques.
S. Papamakarios +6 more
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Multi-Material Two-Photon Lithography Using Liquid Bridges Driven by a Permanent Magnet
2022 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2022 We propose a multi-material two-photon lithography technique using multiple liquid bridges driven by an external magnetic field. Using this method, multi-material 2D and 3D microstructures such as a multicolor overlapping cylinder model were fabricated.
Daiki Ishikawa +3 more
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Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2024Karolis Galvanauskas +6 more
semanticscholar +3 more sources
Micro-Ring Resonator Devices Prototyped on Optical Fiber Tapers by Multi-Photon Lithography
IEEE Journal of Selected Topics in Quantum Electronics, 2021Multi-photon lithography -a powerful laser nanoscale additive-manufacturing method- is employed for structuring micro-ring traveling-wave resonators onto micrometric diameter, optical fiber tapers. These weakly guided, micro-ring resonating structures achieve light circulation with Q-factors of the order of ∼2.0 × 103, for typical diameters of tens of ...
V. Melissinaki +4 more
semanticscholar +2 more sources
3D Vertical Coupler Array for 4-Way Multi-Core Fiber-To- Chip Coupling by Two-Photon Lithography
Conference on Lasers and Electro-Optics, 2020 We demonstrate a 3D vertical coupler array design realizing efficient 4-way multi-core fiber to chip coupling via two-photon lithography on SOI platform, structure shows 3dB insertion loss and wide bandwidth is useful in space-division multiplexing.
Lifeng Chen, Haozhi Luo, Xinlun Cai
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International Conference on Extreme Ultraviolet Lithography 2024
Stochasticity is increasingly recognized as the critical factor affecting EUV lithography performances, while it’s also been recognized that the usable k1-factor is lower for EUV than for DUV exposures.
Hiroshi Fukuda
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Stochasticity is increasingly recognized as the critical factor affecting EUV lithography performances, while it’s also been recognized that the usable k1-factor is lower for EUV than for DUV exposures.
Hiroshi Fukuda
semanticscholar +2 more sources
Machine learning in multi-photon laser lithography
3D Printed Optics and Additive Photonic Manufacturing IVJulian Hering-Stratemeier +3 more
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Demonstration of sub-Rayleigh lithography using a multi-photon absorber
Frontiers in Optics, 2006 We demonstrate resolution enhancement beyond the standard Rayleigh limit using an interferometric, nonlinear optical method. Using PMMA as multi-photon absorbing lithographic material, we record fringes with a period of a quarter of the wavelength.
Heedeuk Shin +3 more
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