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Some of the next articles are maybe not open access.
VG microtech nanolithography
III-Vs Review
, 1992
openaire
copy doi
(10.1016/0961-1290(92)90058-i)
openaccessbutton.org (pdf)
+1 more source
physics
nanofabrication
applied optics
atomic force microscopy
science
photonics
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