Results 211 to 220 of about 5,555 (236)

Control of the nanopositioning devices

42nd IEEE International Conference on Decision and Control (IEEE Cat. No.03CH37475), 2004
We present a paradigm which prescribes a procedure for a systematic design, analysis and development of nanopositioning devices. In this effort, we have used many tools from modern control theory to model devices, to quantify device resolution, bandwidth, range, and robustness, and to tackle undesirable nonlinear effects such as hysteresis and creep ...
openaire   +1 more source

Neural network-based iterative learning control of a piezo-driven nanopositioning stage

Precision engineering, 2023
Jie Ling, Zhao Feng, Long Chen, Yuchuan Zhu, Yongping Pan   +4 more
semanticscholar   +1 more source

Nanopositioning for Lithography and Data Storage

2016
The history of the science shows that there is usually one strong social demand behind a new technology. The new technology, which can solve the key problem, must be got people’s praise and attraction. Nanotechnology is also facing the similar historical opportunity.
Wenbo Zhang, Ming Pang, Changhai Ru
openaire   +1 more source

A robust fractional-order sliding mode control technique for piezoelectric nanopositioning stages in trajectory-tracking applications

Sensors and Actuators A: Physical, 2023
R. Xu, Zhongshi Wang, Miaolei Zhou, Dapeng Tian   +3 more
semanticscholar   +1 more source

Design of a redundant actuated 4-PPR planar 3-DOF compliant nanopositioning stage

Precision engineering, 2023
Miao Yang, Mingyang Sun, Zhe Wu, Jianhua Li, Yi Long   +4 more
semanticscholar   +1 more source

Nanopositioning X–Y stage with an embedded Six-DOF error compensation system based on Abbe and Bryan principles

Measurement
Yaxiong He, Rong-Wei Lin, Rui-jun Li, Jie Li, Z. Cheng, Qiaosheng Pan, Qiangxian Huang, Kuang-Chao Fan   +7 more
semanticscholar   +1 more source

Structural design and active disturbance rejection control of rigid-flexible coupling motion stage for nanopositioning

Journal of the Franklin Institute, 2023
Zhijun Yang, Ruirui Huang, Sen Chen, Liyun Su, Ruiqi Li   +4 more
semanticscholar   +1 more source

Gate recurrent unit neural network based high-precision feedforward control for piezoelectric nanopositioning stage

Engineering applications of artificial intelligence
Bingyang Hou, Ze Wang, Chuxiong Hu, Yu Zhu   +3 more
semanticscholar   +1 more source

Design and analysis of piezo actuated flexure guided nanopositioning stage

Materials Today: Proceedings, 2023
Pankaj, V. Chandra, Ram Murat, Viresh Kumar   +3 more
semanticscholar   +1 more source

OEM nanopositioning

Smart Materials Bulletin, 2002
openaire   +1 more source