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A Piezo-actuated Nanopositioning Stage Based on Spatial Parasitic Motion Principle
Sensors and Actuators A: PhysicalXiaolu Zhao +4 more
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On the actuation nonlinearity of normal-stressed electromagnetic nanopositioning stages
Precision engineeringLi Chen +3 more
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A Delay-based Nonlinear Controller for Nanopositioning of Linear Ultrasonic Motors
International Journal of Control, Automation and SystemsLuis Luna +4 more
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Piezoelectric Multilayer Actuators for Nanopositioning Systems
Nano- i mikrosistemnaya tehnika, 2020A.V. Dayneko +5 more
openaire +1 more source
An XYZ parallel nanopositioning stage with hybrid damping
Sensors and Actuators A: PhysicalZhong Chen +3 more
semanticscholar +1 more source