Results 111 to 120 of about 541 (160)
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A compact nanopositioning stage with high vibrational eigenfrequencies
Review of Scientific Instruments, 2005A compact nanopositioning stage is described that has high vibrational eigenfrequencies and is, therefore, insensitive to external vibrations. The high eigenfrequencies are produced by a rigid structure that is designed so that it does not degrade the motional performance of the stage. Preliminary performance evaluations are presented.
S. J. Ball, C. Folsom, A. B. McLean
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A Long-Stroke Nanopositioning Stage With Annular Flexure Guides
IEEE/ASME Transactions on Mechatronics, 2022This paper presents a long stroke nanopositioning stage supported with annular flexure guides to be used in high precision optical instruments. Firstly, the structure of the novel annular flexure guide and the positioning stage is proposed. Because of the symmetric configuration of the flexure guide, large motion range, high linearity, and high ...
Miao Yang +4 more
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Modeling of a Piezoelectric Based Nanopositioning Stage
2020Piezoelectric-based nanopositioning stages are widely used in ultraprecision positioning due to their high resolution capability. The present work presents an overall model for such a nanopositioning stage, considering phenomena such as hysteresis and creep.
Fernando Villegas +3 more
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Enhancement of Tracking Performance for Piezo-Nanopositioning Stage
2007 International Conference on Mechatronics and Automation, 2007Nano-positioning systems using piezoelectric stack actuator have a very wide range of applications including ultra-precision machine tools, diamond turning machines and motion stage. However, loss of tracking positioning precision in piezoelectric actuator occurs due to hysteresis during long range applications and creep effects when positioning is ...
Changhai Ru +3 more
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Dual-Stage Repetitive Control for High-Speed Nanopositioning
IFAC Proceedings Volumes, 2010Abstract This paper studies an enhanced dual-stage repetitive controller (RC) for improved robustness and tracking of periodic reference trajectories in piezo-based nanopositioning systems. The dual-stage RC system consists of a signal generator designed to provide high gain at the fundamental and all the harmonic frequencies of the reference ...
Yingfeng Shan, Kam K. Leang
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Design and disturbance rejection control of a piezoelectric nanopositioning stage
Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, 2023The article covers structural design and disturbance rejection control of a flexure-based compliant piezoelectric nanopositioning stage. The stage is devised using four-bar amplification mechanisms, auxiliary guiding mechanisms, and a compound parallelogram mechanism. Static and dynamic models of compliant mechanisms are analyzed based on a compliance
Gaohua Wu +5 more
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Robust Sliding-Mode Control for Dual-Stage Nanopositioning Systems
2019 American Control Conference (ACC), 2019In this article, a robust feedback control scheme is presented for dual-stage nanopositioning platforms. Dual-stage nanopositioners consist typically of a long-range, low-speed actuator connected in series with a low-range, highspeed actuator. A sliding mode control structure is designed to dedicate sliding actions to the short-range actuator ...
William S. Nagel, Kam K. Leang
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Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism
2016This chapter presents the design of parallel-kinematic nanopositioning stages with large workspace and low crosstalk. Based on compliant Roberts mechanism, the design of multi-axis parallel compliant stage is synthesized. A new XY nanopositioning stage is studied in detail. Pseudo-rigid-body model (PRBM) is developed to build the quantitative models of
Sicong Wan, Qingsong Xu
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Dual mode predictive control for ultrafast piezoelectric nanopositioning stages
2011 IEEE International Conference on Robotics and Automation, 2011Precision control of piezoelectric motor nanopositioning stages is widely used in a variety of nano-manufacturing equipments. But due to the hysteresis nonlinearity with input saturation, it is challenging to design an ultrafast output feedback controller with large region of closed-loop stability.
Hai-Tao Zhang +2 more
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Spatial-temporal trajectory redesign for dual-stage nanopositioning systems
2017 IEEE International Conference on Advanced Intelligent Mechatronics (AIM), 2017This paper focuses on trajectory redesign for dualstage nanopositioning systems where speed, range, and resolution are considered. This approach differs from many existing approaches that consider only speed. Dual-stage nanopositioning systems are becoming increasingly popular due to their unique ability to achieve long-range and high-speed operation ...
Dejun Guo +3 more
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