Adaptive Notch Filter for Piezo-Actuated Nanopositioning System via Position and Online Estimate Dual-Mode [PDF]
Micromachines, 2021 Due to the excellent advantages of high speed, high precision, and driving force, piezoelectric actuators nanopositioning systems have been widely used in various micro/nanomachining fields.
Chengsi Huang, Hongcheng Li
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Recent Advances in the Design, Modeling, and Control of Flexure-Based Nanopositioning Stages [PDF]
MicromachinesFlexure-based nanopositioning stages have emerged as indispensable tools in advanced fields such as nanotechnology, semiconductor manufacturing, and biomedical engineering, where nanometer-scale precision is paramount. This paper presents a comprehensive
Yijie Liu
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High precision robust control design of piezoelectric nanopositioning platform [PDF]
Scientific Reports, 2022 The piezoelectric nanopositioning platform requires extremely accurate tracking during the task, while the model uncertainty caused by load variations requires strong robustness of the system.
Huan Feng, Aiping Pang, Hongbo Zhou
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Precision Motion Control of a Piezoelectric Actuator via a Modified Preisach Hysteresis Model and Two-Degree-of-Freedom H-Infinity Robust Control [PDF]
Micromachines, 2023 The nonlinear hysteresis phenomenon can occur in piezoelectric-driven nanopositioning systems and can lead to reduced positioning accuracy or result in a serious deterioration of motion control. The Preisach method is widely used for hysteresis modeling;
Ayad G. Baziyad +2 more
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A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle [PDF]
Micromachines, 2022 The precise characterization and measurement of new nanomaterials and nano devices require in situ SEM nanorobotic instrumentation systems, which put forward further technical requirements on nanopositioning techniques of compact structure, cross-scale ...
Junhui Zhu +5 more
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Compensation Method for the Nonlinear Characteristics with Starting Error of a Piezoelectric Actuator in Open-Loop Controls Based on the DSPI Model [PDF]
Micromachines, 2023 Nanopositioning stages with piezoelectric actuators have been widely used in fields such as precision mechanical engineering, but the nonlinear start-up accuracy problem under open-loop control has still not been solved, and more errors will accumulate ...
Dong An +6 more
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Piezoelectric MEMS Linear Motor for Nanopositioning Applications [PDF]
Actuators, 2021 This paper reports the design, fabrication, and performance of piezoelectric bidirectional conveyors based on microelectromechanical systems (MEMS) and featuring 3D-printed legs in bridge resonators.
Víctor Ruiz-Díez +5 more
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High precision structured H∞ control of a piezoelectric nanopositioning platform. [PDF]
PLoS ONE, 2023 The inherent weakly damped resonant modes of the piezoelectric nanopositioning platform and the presence of model uncertainty seriously affect the performance of the system.
Huan Feng +3 more
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Calibration of Nanopositioning Stages
Micromachines, 2015 Accuracy is one of the most important criteria for the performance evaluation of micro- and nanorobots or systems. Nanopositioning stages are used to achieve the high positioning resolution and accuracy for a wide and growing scope of applications ...
Ning Tan +2 more
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Design and Analysis of a Novel Flexure-Based Dynamically Tunable Nanopositioner [PDF]
Micromachines, 2021 Various tools, such as biomedical manipulators, optical aligners, and ultraprecision manufacturing tools, implement nanopositioners that must be dynamically tunable to satisfy the requirements of different working conditions.
Zeying Li, Pengbo Liu, Peng Yan
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