Results 1 to 10 of about 762 (173)

Multi-sensor Approach for Multivalent Applications in Nanometrology

International Journal of Automation and Smart Technology, 2012
The field of nanometrology is subject to increasing complexity as dimensional structures become more intricate with smaller structural widths and increasingly larger surface areas, and with the inclusion of thousands of inspection features.
Manske Eberhard, Gerd Jäger
doaj   +1 more source

Tracking Control of a Galfenol-Actuated Nanopositioning Stage Using Feedforward Control with a Disturbance Observer

Advances in Materials Science and Engineering, 2019
The main challenge of the galfenol actuator for high-precision positioning is the inherent nonsmooth hysteresis, which may lead to undesirable inaccuracies or oscillations and even instability.
Shiping Jiang, Bin Xu, Shuxin Liu, Wei Zhu   +3 more
doaj   +1 more source

Development of a Compact Three-Degree-of-Freedom Laser Measurement System with Self-Wavelength Correction for Displacement Feedback of a Nanopositioning Stage

Applied Sciences, 2018
This paper presents a miniature three-degree-of-freedom laser measurement (3DOFLM) system for displacement feedback and error compensation of a nanopositioning stage.
Yindi Cai, Zhifeng Lou, Siying Ling, Bo-syun Liao, Kuang-chao Fan   +4 more
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NPS6D100—A 6D Nanopositioning System with Sub-10 nm Performance in a Ø100 mm × 10 mm Workspace

Actuators
This paper presents the development of a compact nanopositioning stage with long-range capabilities and six-degree-of-freedom (DOF) closed-loop control.
Steffen Hesse, Alex Huaman, Michael Katzschmann, Ludwig Herzog   +3 more
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Short-Range Six-Axis Interferometer Controlled Positioning for Scanning Probe Microscopy

Sensors, 2014
We present a design of a nanometrology measuring setup which is a part of the national standard instrumentation for nanometrology operated by the Czech Metrology Institute (CMI) in Brno, Czech Republic.
Josef Lazar, Petr Klapetek, Miroslav Valtr, Jan Hrabina, Zdenek Buchta, Onrej Cip, Martin Cizek, Jindrich Oulehla, Mojmir Sery   +8 more
doaj   +1 more source

A Piezo-Driven Compliant Nanopositioning Stage with Large Stroke for Micro/Nano Manipulation

MATEC Web of Conferences, 2016
This paper presents the design, analysis, and testing of a single-axis compliant nanopositioning stage with large stroke driven by piezoelectric actuator for micro/nano manipulation. In the developed stage, a hybrid displacement amplifier integrating two
Zhu Xiaobo, Wen Zhijie, Liu Pinkuan
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New solution for the high accuracy alignment of accelerator components

Physical Review Accelerators and Beams, 2017
Several state-of-the-art metrology measurement methods have been investigated and combined for a fiducialization of accelerator components in the micrometric regime.
D. Caiazza, N. Catalan Lasheras, H. Mainaud Durand, M. Modena, C. Sanz, D. Tshilumba, V. Vlachakis, M. Wendt, S. Zorzetti   +8 more
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Capacitance Estimation for Piezoelectric Actuators, an Artificial Intelligence Approach

IET Science, Measurement & Technology
This research aimed to investigate charge‐based position estimation/control of piezo‐actuated nanopositioning systems using a data‐driven approach. In the analysis of these systems, piezoelectric actuators are widely approximated as capacitors with a ...
Zohreh Rafiei Samani, Morteza Mohammadzaheri, Mojtaba Ghodsi, Wenyan Wu, Nasser Sherkat, Houman Alipooramirabad   +5 more
doaj   +1 more source

LSTM-Inversion-Based Feedforward–Feedback Nanopositioning Control

Machines
This work proposes a two-degree of freedom (2DOF) controller for motion tracking of nanopositioning devices, such as piezoelectric actuators (PEAs), with a broad bandwidth and high precision.
Ruocheng Yin, Juan Ren
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Micro/Nanoscale Parallel Patterning of Functional Biomolecules, Organic Fluorophores and Colloidal Nanocrystals

Nanoscale Research Letters, 2009
We describe the design and optimization of a reliable strategy that combines self-assembly and lithographic techniques, leading to very precise micro-/nanopositioning of biomolecules for the realization of micro- and nanoarrays of functional DNA and ...
Brunetti V, Vecchio G, Torre A, Rinaldi R, Sabella S, Cingolani R, Pompa PP   +6 more
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