Adaptive Notch Filter for Piezo-Actuated Nanopositioning System via Position and Online Estimate Dual-Mode [PDF]
Micromachines, 2021 Due to the excellent advantages of high speed, high precision, and driving force, piezoelectric actuators nanopositioning systems have been widely used in various micro/nanomachining fields.
Chengsi Huang, Hongcheng Li
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Recent Advances in the Design, Modeling, and Control of Flexure-Based Nanopositioning Stages [PDF]
MicromachinesFlexure-based nanopositioning stages have emerged as indispensable tools in advanced fields such as nanotechnology, semiconductor manufacturing, and biomedical engineering, where nanometer-scale precision is paramount. This paper presents a comprehensive
Yijie Liu
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Calibration of Nanopositioning Stages
Micromachines, 2015 Accuracy is one of the most important criteria for the performance evaluation of micro- and nanorobots or systems. Nanopositioning stages are used to achieve the high positioning resolution and accuracy for a wide and growing scope of applications ...
Ning Tan +2 more
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High precision robust control design of piezoelectric nanopositioning platform [PDF]
Scientific Reports, 2022 The piezoelectric nanopositioning platform requires extremely accurate tracking during the task, while the model uncertainty caused by load variations requires strong robustness of the system.
Huan Feng, Aiping Pang, Hongbo Zhou
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Precision Motion Control of a Piezoelectric Actuator via a Modified Preisach Hysteresis Model and Two-Degree-of-Freedom H-Infinity Robust Control [PDF]
Micromachines, 2023 The nonlinear hysteresis phenomenon can occur in piezoelectric-driven nanopositioning systems and can lead to reduced positioning accuracy or result in a serious deterioration of motion control. The Preisach method is widely used for hysteresis modeling;
Ayad G. Baziyad +2 more
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The hard X-ray ptychography endstation at the Taiwan Photon Source. [PDF]
J Synchrotron RadiatThe newly commissioned hard X‐ray ptychography endstation at the Taiwan Photon Source, TPS 25A2, is introduced, detailing the instrumental specifications and demonstrating a benchmark spatial resolution of 6.9 nm in 2D, showcased through the imaging of a standard test pattern, inorganic nanoparticles and a complex biological structure.Following our ...
Tsai YW +9 more
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A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle [PDF]
Micromachines, 2022 The precise characterization and measurement of new nanomaterials and nano devices require in situ SEM nanorobotic instrumentation systems, which put forward further technical requirements on nanopositioning techniques of compact structure, cross-scale ...
Junhui Zhu +5 more
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Rotating Gold Nanomotors for High-Resolution Mapping of Subcellular Nanomotions. [PDF]
Small MethodsA nanomotor‐based method uses optically driven, rotating gold nanorods to detect nanometer‐scale cellular movements with 10 nm spatial and millisecond temporal resolution. Applied to live endothelial cells, the technique reveals subcellular mechanical activity and distinct frequency regimes, capturing transient, localized oscillations.
Tornéus E +3 more
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Compensation Method for the Nonlinear Characteristics with Starting Error of a Piezoelectric Actuator in Open-Loop Controls Based on the DSPI Model [PDF]
Micromachines, 2023 Nanopositioning stages with piezoelectric actuators have been widely used in fields such as precision mechanical engineering, but the nonlinear start-up accuracy problem under open-loop control has still not been solved, and more errors will accumulate ...
Dong An +6 more
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Design and Research of 2-DOF Piezoelectric Nanopositioning Stage with Multiple Displacement Amplifiers and Decoupling Beams [PDF]
MicromachinesA piezoelectric (PZT) nanopositioning stage with large stroke and low crosstalk is relatively appealing for microdisplacement operation. Rhombus and lever amplifiers are used to increase the overall displacement amplification ratio (DAR), and the ...
Jing Yin +3 more
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