Results 31 to 40 of about 762 (173)
Preloading Piezoelectric Stack Actuator in High-speed Nanopositioning Systems
Frontiers in Mechanical Engineering, 2016 Recent development in high-speed nanotechnology applications such as scanning probe microscopy and nanofabrication has increased interest on the advancement of high-bandwidth flexure-guided nanopositioning systems.
Yuen Yong
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Micromachines, 2020 The piezoelectrically-actuated stick-slip nanopositioning stage (PASSNS) has been applied extensively, and many designs of PASSNSs have been developed. The friction force between the stick-slip surfaces plays a critical role in successful movement of the
Junhui Zhu +7 more
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Suppression of Air Refractive Index Variations in High-Resolution Interferometry
Sensors, 2011 The influence of the refractive index of air has proven to be a major problem on the road to improvement of the uncertainty in interferometric displacement measurements.
Zdeněk Buchta +4 more
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Frequency Noise Properties of Lasers for Interferometry in Nanometrology
Sensors, 2013 In this contribution we focus on laser frequency noise properties and their influence on the interferometric displacement measurements. A setup for measurement of laser frequency noise is proposed and tested together with simultaneous measurement of ...
Ondřej Číp +3 more
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Piezoelectric MEMS Linear Motor for Nanopositioning Applications
Actuators, 2021 This paper reports the design, fabrication, and performance of piezoelectric bidirectional conveyors based on microelectromechanical systems (MEMS) and featuring 3D-printed legs in bridge resonators.
Víctor Ruiz-Díez +5 more
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Design and Analysis of a Novel Flexure-Based Dynamically Tunable Nanopositioner
Micromachines, 2021 Various tools, such as biomedical manipulators, optical aligners, and ultraprecision manufacturing tools, implement nanopositioners that must be dynamically tunable to satisfy the requirements of different working conditions.
Zeying Li, Pengbo Liu, Peng Yan
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Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing [PDF]
Journal of Sensors and Sensor Systems, 2015 Measurement tasks of modern micro- and nanometrology are posing a problem for current measurement instruments with decreasing structure sizes and rising aspect ratios.
A. Schuler, T. Hausotte, Z. Sun
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Analysis of Inductive Displacement Sensors with Large Range and Nanoscale Resolution
Applied Sciences, 2021 With the advantages of high resolution, structural simplicity, reliability, compact size, and high sensitivity, inductive sensors have been widely used in nanopositioning systems.
Qiang He +5 more
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Image-Guided Nanopositioning Scheme for SEM [PDF]
IEEE Transactions on Automation Science and Engineering, 2018 Positioning of micro-nanoobjects inside a scanning electron microscope (SEM) for manipulation is a key and challenging task to perform. Often it is performed by skilled operators via teleoperation, which is tedious and lacks repeatability. In this paper, rendering this task as an image-guided problem, we present a frequency domain scheme for automatic ...
Naresh Marturi +3 more
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Tehnički GlasnikIn this study, we present the optimization of a Fabry-Perot interferometer with a differential signal utilized as the laser encoder to meet the stringent demands of nanopositioning.
Syuan-Cheng Chang +2 more
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