Results 1 to 10 of about 779 (186)
Development of a XYθz 3-DOF nanopositioning stage with linear displacement amplification device [PDF]
MATEC Web of Conferences, 2017 The main purpose of this study is to develop a XYθZ 3-DOF nanopositioning stage with linear displacement amplification device. This stage is used by three groups of linear displacement amplification device to composition, and thus achieves precise XYθZ 3-
Chu Chih-Liang +2 more
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Advances in Materials Science and Engineering, 2019 The main challenge of the galfenol actuator for high-precision positioning is the inherent nonsmooth hysteresis, which may lead to undesirable inaccuracies or oscillations and even instability.
Shiping Jiang +3 more
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A Piezo-Driven Compliant Nanopositioning Stage with Large Stroke for Micro/Nano Manipulation
MATEC Web of Conferences, 2016 This paper presents the design, analysis, and testing of a single-axis compliant nanopositioning stage with large stroke driven by piezoelectric actuator for micro/nano manipulation. In the developed stage, a hybrid displacement amplifier integrating two
Zhu Xiaobo, Wen Zhijie, Liu Pinkuan
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Micromachines, 2022 The paper proposes a three-degrees-of-freedom flexible nano-positioning stage constructed from compliant flexures and piezoelectric thin-sheet actuators, featuring a compact size and fast dynamic responses, which can be extensively applied to the typical
Ning Chen, Xianfu Liu
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Development of a Sinusoidal Corrugated Dual-Axial Flexure Mechanism for Planar Nanopositioning
Actuators, 2022 Taking advantage of the concurrent stretching and bending property of corrugated flexure hinges, a sinusoidal corrugated flexure linkage was proposed and applied for the construction of a corrugated dual-axial mechanism with structural symmetry and ...
Yuhan Niu +4 more
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Dual-Stage Nanopositioning for High-Speed Scanning Probe Microscopy [PDF]
IEEE/ASME Transactions on Mechatronics, 2014 IEEE/ASME Transactions on Mechatronics, 19 (3)
Tuma, Tomas +5 more
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Nonlinear Optimal Tracking Control of a Piezoelectric Nanopositioning Stage [PDF]
SPIE Proceedings, 2006 High performance nanopositioning stages, used in a variety of applications such as atomic force microscopy and three-dimensional nanometer-scale lithography, require stringent position control over relatively large displacements and a broad frequency range.
Ralph C. Smith, William S. Oates
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Hybrid Adaptive Controller Design with Hysteresis Compensator for a Piezo-Actuated Stage
Applied Sciences, 2022 Piezo-actuated stage (P-AS) has become the topic of considerable interest in the realm of micro/nanopositioning technology in the recent years owing to its advantages, such as high positioning accuracy, high response speed, and large output force ...
Yannan Zhang +4 more
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IEEE Access, 2019 The stick-slip piezoelectric stage plays an important role in micro-operation and industrial applications due to its nanometer resolution. However, under high load, the output performance of the piezoelectric stage will be seriously influenced.
Yang Yu +6 more
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Dynamic Analysis of a 5‐DOF Flexure‐Based Nanopositioning Stage
Mathematical Problems in Engineering, 2019 A multibody dynamic model is developed for dynamic analysis of a 5‐DOF flexure‐based nanopositioning stage in the projection optical system of the semiconductor lithography in this paper. The 5‐DOF stage is considered as an assembly of rigid bodies interconnected by elastic flexure hinges.
Yiping Shen +3 more
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