Design Optimization for the Measurement Accuracy Improvement of a Large Range Nanopositioning Stage [PDF]
Sensors, 2016 Both an accurate machine design and an adequate metrology loop definition are critical factors when precision positioning represents a key issue for the final system performance.
Marta Torralba +3 more
doaj +9 more sources
A Novel Stick-Slip Nanopositioning Stage Integrated with a Flexure Hinge-Based Friction Force Adjusting Structure [PDF]
Micromachines, 2020 The piezoelectrically-actuated stick-slip nanopositioning stage (PASSNS) has been applied extensively, and many designs of PASSNSs have been developed. The friction force between the stick-slip surfaces plays a critical role in successful movement of the
Junhui Zhu +7 more
doaj +4 more sources
A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle [PDF]
Micromachines, 2022 The precise characterization and measurement of new nanomaterials and nano devices require in situ SEM nanorobotic instrumentation systems, which put forward further technical requirements on nanopositioning techniques of compact structure, cross-scale ...
Junhui Zhu +5 more
doaj +3 more sources
Calibration of Nanopositioning Stages
Micromachines, 2015 Accuracy is one of the most important criteria for the performance evaluation of micro- and nanorobots or systems. Nanopositioning stages are used to achieve the high positioning resolution and accuracy for a wide and growing scope of applications ...
Ning Tan +2 more
doaj +4 more sources
Development of a Parallel Dual-Stage Compliant Nanopositioning System
Actuators, 2022 This paper presents a novel parallel dual-stage compliant nanopositioning system (PDCNS), aimed at nanoscale positioning for microscale manipulation. In the developed PDCNS, the coarse stage actuated by the voice coil motor and the fine stage driven by ...
Xu Yang +4 more
doaj +3 more sources
Design and Performance of a Spatial 6-RRRR Compliant Parallel Nanopositioning Stage [PDF]
Micromachines, 2022 Piezoelectric actuators (PEAs) and compliant parallel mechanisms (CPMs) are advantageous for designing nanopositioning stages (NPSs) with multiple degrees of freedom (multi-DOFs).
Ruizhou Wang, Heng Wu
doaj +2 more sources
NPS6D200—A Long Range Nanopositioning Stage with 6D Closed Loop Control
Applied SciencesThis work presents the new development of a nanopositioning machine for a large operating range. The machine, called NPS6D200, provides Ø200 mm planar and 25 mm vertical travel range and applies a 6D closed loop control with all drive forces applied ...
Steffen Hesse +4 more
doaj +4 more sources
Design and Research of 2-DOF Piezoelectric Nanopositioning Stage with Multiple Displacement Amplifiers and Decoupling Beams [PDF]
MicromachinesA piezoelectric (PZT) nanopositioning stage with large stroke and low crosstalk is relatively appealing for microdisplacement operation. Rhombus and lever amplifiers are used to increase the overall displacement amplification ratio (DAR), and the ...
Jing Yin +3 more
doaj +2 more sources
One-Dimensional Control System for a Linear Motor of a Two-Dimensional Nanopositioning Stage Using Commercial Control Hardware [PDF]
Micromachines, 2018 A two-dimensional (2D) nanopositioning platform stage (NanoPla) is in development at the University of Zaragoza. To provide a long travel range, the actuators of the NanoPla are four Halbach linear motors.
Lucía Candela Díaz Pérez +3 more
doaj +2 more sources
NPS6D100—A 6D Nanopositioning System with Sub-10 nm Performance in a Ø100 mm × 10 mm Workspace [PDF]
ActuatorsThis paper presents the development of a compact nanopositioning stage with long-range capabilities and six-degree-of-freedom (DOF) closed-loop control.
Steffen Hesse +3 more
doaj +3 more sources