Results 21 to 30 of about 762 (173)

High precision structured H∞ control of a piezoelectric nanopositioning platform. [PDF]

PLoS ONE, 2023
The inherent weakly damped resonant modes of the piezoelectric nanopositioning platform and the presence of model uncertainty seriously affect the performance of the system.
Huan Feng, Hongbo Zhou, Congmei Jiang, Aiping Pang   +3 more
doaj   +2 more sources

Near-Field Direct Writing Based on Piezoelectric Micromotion for the Programmable Manufacturing of Serpentine Structures [PDF]

Micromachines
Serpentine microstructures offer excellent physical properties, making them highly promising in applications in stretchable electronics and tissue engineering.
Xun Chen, Xuanzhi Zhang, Jianfeng Sun, Rongguang Zhang, Xuanyang Liang, Jiecai Long, Jingsong Yao, Xin Chen, Han Wang, Yu Zhang, Jiewu Leng, Renquan Lu   +11 more
doaj   +2 more sources

Design and Characterization of a Planar Micro-Conveyor Device Based on Cooperative Legged Piezoelectric MEMS Resonators

Micromachines, 2022
This paper reports the design, fabrication, and performance of a hybrid piezoelectric planar micro-conveyor based on Micro-Electromechanical Systems (MEMS) bridge resonators and featuring 3D-printed vertical legs.
Víctor Ruiz-Díez, Abdallah Ababneh, Helmut Seidel, José Luis Sánchez-Rojas   +3 more
doaj   +1 more source

A Digital Observer-Based Repetitive Learning Composite Control Method for Large Range Piezo-Driven Nanopositioning Systems

Machines, 2022
In this study, a novel digital compound compensation method is proposed to compensate for the hysteresis nonlinearity and the drift disturbance of a piezoelectric nanopositioning system with a large range.
Cunhuan Liu, Yongchun Fang, Yinan Wu, Zhi Fan   +3 more
doaj   +1 more source

Linear Matrix Inequality Approach to Designing Damping and Tracking Control for Nanopositioning Application

Vibration, 2022
This paper presents a method to extend the eigenstructure assignment based design of the Positive Position Feedback (PPF) damping controller to the family of well-known second-order Positive Feedback Controllers (PFC) namely: (i) the Positive Velocity ...
Adedayo K. Babarinde, Sumeet S. Aphale
doaj   +1 more source

Adaptive control of a nanopositioning device [PDF]

2012 IEEE 51st IEEE Conference on Decision and Control (CDC), 2012
High-bandwidth tracking control is desirable in many nanopositioning applications, including scanning probe microscopy. Typical nanopositioner designs have several sources of uncertainty which can degrade control performance, and even induce instability.
Arnfinn Aas Eielsen, Jan Tommy Gravdahl
openaire   +2 more sources

Investigations on Long-Range AFM Scans Using a Nanofabrication Machine (NFM-100)

Proceedings, 2020
The focus of this work lies on investigations on a new Nano Fabrication Machine (NFM-100) with a mounted atomic force microscope (AFM). This installed tip-based measuring system uses self-sensing and self-actuated microcantilevers, which can be used ...
Jaqueline Stauffenberg, Ingo Ortlepp, Christoph Reuter, Mathias Holz, Denis Dontsov, Christoph Schäffel, Steffen Strehle, Jens-Peter Zöllner, Ivo W. Rangelow, Eberhard Manske   +9 more
doaj   +1 more source

Fabrication and verification of a single aligned nanofibre gas sensor based on non‐contact direct writing method

Electronics Letters, 2023
In this letter, the non‐contact direct writing method for producing single aligned fibre utilizing polyvinylpyrrolidone (PVP) polymer has been explored. It has been shown that with the help of this method, nanofibres can be created in a controlled manner
Sadegh Pouriyan Zadeh, Alireza Nikfarjam, Alireza Salavati Mohammadi   +2 more
doaj   +1 more source

Fixed-Time Third-Order Super-Twisting-like Sliding Mode Motion Control for Piezoelectric Nanopositioning Stage

Mathematics, 2021
This paper presents a novel third-order super-twisting-like integral sliding mode controller (3-ISMC) for trajectory tracking of nanopositioning applications.
Guangwei Wang, Bo Wang, Chengxi Zhang
doaj   +1 more source

Scanning effects in coherent fourier scatterometry [PDF]

Journal of the European Optical Society-Rapid Publications, 2012
Incoherent Fourier Scatterometry (IFS) is a successful tool for high accuracy nano-metrology. As this method uses only far field measurements, it is very convenient from the point of view of industrial applications.
Roy S., El Gawhary O., Kumar N., Pereira S. F., Urbach H. P.   +4 more
doaj   +1 more source