A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle [PDF]
Micromachines, 2022 The precise characterization and measurement of new nanomaterials and nano devices require in situ SEM nanorobotic instrumentation systems, which put forward further technical requirements on nanopositioning techniques of compact structure, cross-scale ...
Junhui Zhu +5 more
doaj +2 more sources
Compensation Method for the Nonlinear Characteristics with Starting Error of a Piezoelectric Actuator in Open-Loop Controls Based on the DSPI Model [PDF]
Micromachines, 2023 Nanopositioning stages with piezoelectric actuators have been widely used in fields such as precision mechanical engineering, but the nonlinear start-up accuracy problem under open-loop control has still not been solved, and more errors will accumulate ...
Dong An +6 more
doaj +2 more sources
Design and Performance of a Spatial 6-RRRR Compliant Parallel Nanopositioning Stage [PDF]
Micromachines, 2022 Piezoelectric actuators (PEAs) and compliant parallel mechanisms (CPMs) are advantageous for designing nanopositioning stages (NPSs) with multiple degrees of freedom (multi-DOFs).
Ruizhou Wang, Heng Wu
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Calibration of Nanopositioning Stages
Micromachines, 2015 Accuracy is one of the most important criteria for the performance evaluation of micro- and nanorobots or systems. Nanopositioning stages are used to achieve the high positioning resolution and accuracy for a wide and growing scope of applications ...
Ning Tan +2 more
doaj +3 more sources
Recent Advances in the Design, Modeling, and Control of Flexure-Based Nanopositioning Stages [PDF]
MicromachinesFlexure-based nanopositioning stages have emerged as indispensable tools in advanced fields such as nanotechnology, semiconductor manufacturing, and biomedical engineering, where nanometer-scale precision is paramount. This paper presents a comprehensive
Yijie Liu
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Actuators, 2022 This paper presents a flexure-based displacement reduction mechanism driven by a voice coil motor to improve the motion resolution and eliminate the hysteresis nonlinearity of the traditional piezo-actuated micropositioning/nanopositioning stages.
Yunzhuang Chen, Leijie Lai
doaj +1 more source
Dual-Stage Nanopositioning for High-Speed Scanning Probe Microscopy [PDF]
IEEE/ASME Transactions on Mechatronics, 2014 IEEE/ASME Transactions on Mechatronics, 19 (3)
Tuma, Tomas +5 more
openaire +2 more sources
Nonlinear Optimal Tracking Control of a Piezoelectric Nanopositioning Stage [PDF]
SPIE Proceedings, 2006 High performance nanopositioning stages, used in a variety of applications such as atomic force microscopy and three-dimensional nanometer-scale lithography, require stringent position control over relatively large displacements and a broad frequency range.
Ralph C. Smith, William S. Oates
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Long-Stroke Nanopositioning Stage Driven by Piezoelectric Motor [PDF]
Journal of Sensors, 2014 This paper reported a biaxial nanopositioning stage single-driven by piezoelectric motor. The employed piezoelectric motor can perform two different driving modes, namely, AC drive mode to drive in long-stroke and at high-speed and DC scanning mode with the high-resolution of several nanometers, which satisfies the requirements of both long-stroke and ...
Yong Wang +4 more
openaire +1 more source
Butterworth Pattern-based Simultaneous Damping and Tracking Controller Designs for Nanopositioning Systems [PDF]
, 2016 Peer reviewedPublisher ...
Aphale, Sumeet Sunil +3 more
core +2 more sources