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A novel direct drive electromagnetic XY nanopositioning stage
CIRP Annals, 2021Abstract To overcome the inherent limitation of existing nanopositioning stages running in hundreds of micrometres, a novel normal-stressed electromagnetic actuator is developed to construct a direct drive XY nanopositioning stage, which features a contactless dual-axial actuation with a relatively high force density, a loosely-constrained stroke ...
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Phase leading active disturbance rejection control for a nanopositioning stage
ISA Transactions, 2021Hysteresis severely reduces positioning accuracy of a piezoelectric nanopositioning system. Inverse hysteresis model-based control is difficult to maintain satisfied performance in presence of uncertainties and disturbances. Linear active disturbance rejection control (LADRC) is a practical approach.
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A MEMS Stage for 3-Axis Nanopositioning
2007 IEEE International Conference on Automation Science and Engineering, 2007Applications in micro and nanotechnologies require millimeter-sized devices that are capable of 3-axis positioning with motion ranges of micrometers and resolutions of nanometers. This paper reports on the design, fabrication, and testing of a MEMS-based 3-axis positioning stage.
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Maglev 6-DOF Stage for Nanopositioning
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Range-based control of dual-stage nanopositioning systems
Review of Scientific Instruments, 2014A novel dual-stage nanopositioner control framework is presented that considers range constraints. Dual-stage nanopositioners are becoming increasingly popular in applications such as scanning probe microscopy due to their unique ability to achieve long-range and high-speed operation.
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