Results 111 to 120 of about 2,574,547 (240)
Inverse lithography technology (ILT) plays a pivotal role in advanced semiconductor manufacturing because it enables pixel-level mask modifications, significantly enhances pattern fidelity, and expands process windows. However, traditional gradient-based
Jie Zhou +5 more
doaj +1 more source
The PRIMA Thesaurus for Materials Science and Engineering
The PRIMA Thesaurus is a structured vocabulary designed to improve how materials science data is described and shared. Developed with input from multiple experts, it enables clear documentation of research workflows, data exchange, and reuse across platforms.
Rossella Aversa +8 more
wiley +1 more source
Depth–Depth of Focus Moiré Fringe Alignment via Broad-Spectrum Modulation
Alignment precision is a crucial factor that directly impacts overlay accuracy, which is one of three fundamental indicators of lithography. The alignment method based on the Moiré fringe has the advantages of a simple measurement optical path and high ...
Dajie Yu +5 more
doaj +1 more source
A Lightweight Procedural Layer for Hybrid Experimental–Computational Workflows in Materials Science
We unveil a prototype hybrid‐workflow framework that fuses automatedcomputation with hands‐on experiments. Built atop pyiron, a lightweight, parameterized layer translates procedure descriptions into executable manual steps, syncing instrument settings, human interventions, and data capture in real‐time today.
Steffen Brinckmann +8 more
wiley +1 more source
An unescapable trend of hyperspectral image (HSI) has been toward classification with high accuracy and splendid performance. In recent years, Transformers have made remarkable progress in the HSI classification task.
Binxin Luo +5 more
doaj +1 more source
PASTA‐ELN: Simplifying Research Data Management for Experimental Materials Science
Research data management faces ongoing hurdles as many ELNs remain complex and restrictive. PASTA‐ELN offers an open‐source, cross‐platform solution that prioritizes simplicity, offline access, and user control. Its in tuitive folder structure, modular Python add‐ons, and open formats enable seamless documentation, FAIR data practices, and easy ...
S. Brinckmann, G. Winkens, R. Schwaiger
wiley +1 more source
DOF Enhanced via the Multi-Wavelength Method for the Moiré Fringe-Based Alignment
Alignment systems are core subsystems of lithography, which directly affect the overlay accuracy of the lithography process. The Moiré fringe-based alignment method has the advantages of high precision and low complexity.
Kairui Zhang +5 more
doaj +1 more source
Current Status and Challenges in Data Collection for Aerospace Coatings Deposited by Plasma Spraying
An innovative approach has been integrated into the GRENAT project to optimize plasma spraying and coating performance. Raw materials are accelerated and melted in the plasma generated by torches, creating coatings. Monitoring sensors collect process data which are combined with ex situ characterization data.
Lila Randriamananjara +8 more
wiley +1 more source
This article presents a Robust Servo Linear Quadratic Regulator (RSLQR) method based on the Linear Extended State Observer (LESO), which solves the problem of optimal tracking control of electro-optical system under disturbance.
Chao Liu +5 more
doaj +1 more source
Optical Manipulation. Biological Applications of Optical Manipulation.
KURACHI, Masashi, TASHIRO, Hideo
openaire +2 more sources

