A Pressure Microsensor Made of Parylene‐C for Use as Medical Implant
Advanced Materials Technologies, EarlyView.A monolithic parylene‐C pressure sensor with gold strain gauges provides 6.2 μV$\mu{\rm V}$·mmHg$\cdot{\rm mmHg}$−1$^{-1}$ sensitivity. The morphology of a sputtered thin film strain sensor is granular/columnar, which results in a high gauge factor of 7.5. Thermal bonding and parylene‐C coating create a hermetic cavity.
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