Results 241 to 249 of about 7,739 (249)
Some of the next articles are maybe not open access.
Variation of polish pad shape during pad dressing
Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 1999exaly
Evaluation of the wafer polishing pad capacity and lifetime in the machining of reliable elevations
International Journal of Machine Tools and Manufacture, 2013Eun-Sang Lee, Seong-Hyun Kim
exaly
Factors influencing the dressing rate of chemical mechanical polishing pad conditioning
International Journal of Advanced Manufacturing Technology, 2006exaly
Study on quasi-orthogonal machining of elastomer pad by single-point diamond tool
International Journal of Advanced Manufacturing Technology, 2017Chao-Chang A Chen +2 more
exaly
Effect of geometry error on accuracy of large-diameter pads used for CMP dressing
International Journal of Advanced Manufacturing Technology, 2018Z D Jiang
exaly
A model to simulate surface roughness in the pad dressing process
Journal of Mechanical Science and Technology, 2007exaly
Organic diamond disk versus brazed diamond disk for dressing a chemical–mechanical polishing pad
Diamond and Related Materials, 2012exaly

