Results 241 to 249 of about 7,739 (249)
Some of the next articles are maybe not open access.

Variation of polish pad shape during pad dressing

Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 1999
exaly  

Evaluation of the wafer polishing pad capacity and lifetime in the machining of reliable elevations

International Journal of Machine Tools and Manufacture, 2013
Eun-Sang Lee, Seong-Hyun Kim
exaly  

Factors influencing the dressing rate of chemical mechanical polishing pad conditioning

International Journal of Advanced Manufacturing Technology, 2006
exaly  

Study on quasi-orthogonal machining of elastomer pad by single-point diamond tool

International Journal of Advanced Manufacturing Technology, 2017
Chao-Chang A Chen   +2 more
exaly  

Effect of geometry error on accuracy of large-diameter pads used for CMP dressing

International Journal of Advanced Manufacturing Technology, 2018
Z D Jiang
exaly  

A model to simulate surface roughness in the pad dressing process

Journal of Mechanical Science and Technology, 2007
exaly  

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