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IEEE Transactions on Semiconductor Manufacturing, 1993
Polysilicon buffered LOCOS (PBL) does not exhibit sufficient field oxide recess to support aggressive device scaling without the introduction of processes which are difficult to control. Recently, polysilicon encapsulated local oxidation (PELOX) has been proposed as an easily scaled isolation technique that exhibits LOCOS equivalent recess.
S.S. Roth +5 more
openaire +1 more source
Polysilicon buffered LOCOS (PBL) does not exhibit sufficient field oxide recess to support aggressive device scaling without the introduction of processes which are difficult to control. Recently, polysilicon encapsulated local oxidation (PELOX) has been proposed as an easily scaled isolation technique that exhibits LOCOS equivalent recess.
S.S. Roth +5 more
openaire +1 more source
2016
As suggested in Chap. 4, the learning outcomes we imagined for an agile PBL ecology for learning in this book not only do include (inter)disciplinary skills and knowledge but instead constitute a whole way-of-being, which includes an attitude and disposition. Agile PBL serves as a curricular and pedagogical vehicle to facilitate the development of this
Megan Yih Chyn A. Kek, Henk Huijser
openaire +1 more source
As suggested in Chap. 4, the learning outcomes we imagined for an agile PBL ecology for learning in this book not only do include (inter)disciplinary skills and knowledge but instead constitute a whole way-of-being, which includes an attitude and disposition. Agile PBL serves as a curricular and pedagogical vehicle to facilitate the development of this
Megan Yih Chyn A. Kek, Henk Huijser
openaire +1 more source
Development of Integrated Collaborative E-PBL (ICE-PBL) System for Hybrid E-PBL Support
The Journal of Humanities and Social sciences 21, 2023Jisoon Park, Sueun Ju
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Editorial PBL curricula versus PBL courses
Biochemistry and Molecular Biology Education, 2001openaire +1 more source