Results 211 to 220 of about 159,755 (262)

Interferometer for phase measurements in phase-shift masks

SPIE Proceedings, 1993
The etch depth of phase shift masks is typically measured by means of profilometry and the expected phase shift is calculated from a knowledge of the refractive index at the lithographic wavelength of interest. In the case of masks utilizing deposited films the index may differ from values for bulk materials and commonly varies to some degree with ...
Derek B. Dove, T. C. Chieu, Amalkumar P. Ghosh   +2 more
openaire   +1 more source

Broadband nulling of a vortex phase mask

Optics Letters, 2005
A pulse transmitted through a helical vortex phase mask undergoes a temporal Hilbert transform. The fluence transmitted into the unfavorable plane wave mode is found to increase as the square of the bandwidth and, to first order, is independent of the topological charge.
openaire   +2 more sources

Phase correct routing for alternating phase shift masks

Proceedings of the 41st annual Design Automation Conference, 2004
In this paper, we investigate routing restrictions that enable the generation of "correct by construction" layouts for Dark Field AltPSM. Existing routers produce designs in which coloring errors are numerous, and up to 15% of the pin locations in macros may cause unavoidable coloring errors.
openaire   +1 more source

Security-enhanced multiple-image encryption based on modified iterative phase retrieval algorithm with structured phase mask in Fresnel domain

Optik, 2022
Yanfeng Su, Wenqiang Wan, Zhihan Wang
exaly  

Attenuated Phase-Shifting Mask

2009
If the opaque regions on a COG mask become partially transmitting with a 180° phase relative to the bright regions, as shown in Fig. 6.1, an attenuated PSM results [15, 16]. As opposed to an alternating PSM where all phase regions image onto the wafer, the partially transmitting background of an attenuated PSM—usually with an intensity transmission ...
openaire   +1 more source

Phase restoration of digital holographic microscopy with an adaptive reliability mask for phase unwrapping in microstructure testing

Optics and Lasers in Engineering, 2021
Benyong Chen, Liping Yan, Liu Huang
exaly  

3D Hierarchical Architectures Prepared by Single Exposure Through a Highly Durable Colloidal Phase Mask

Advanced Materials, 2014
Sung-Gyu Park, Su Yeon Lee, Tae Soup Shim   +2 more
exaly  

A robust phase unwrapping algorithm based on reliability mask and weighted minimum least-squares method

Optics and Lasers in Engineering, 2019
Benyong Chen, Liping Yan
exaly  

Design of reconfigurable and structured spiral phase mask for optical security system

Optics Communications, 2016
Xueju Shen
exaly  

Experimental and numerical investigations on a flexible paraffin/fiber composite phase change material for thermal therapy mask

Energy Storage Materials, 2017
Xiaowen Zhang, , Zhengguo Zhang
exaly