Results 1 to 10 of about 69,644 (326)
Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage [PDF]
Nano-Micro LettersHighlights The fundamental principles and step-by-step procedures of photolithography are introduced, and a nuanced understanding of its operational mechanisms and the criteria for photoresist selection is offered.
Yuan Ma, Sen Wang, Zhong-Shuai Wu
doaj +2 more sources
Large-Scale High-Accuracy and High-Efficiency Phase Plate Machining [PDF]
NanomaterialsIn this paper, multifunctional, multilevel phase plates of quartz substrate were efficiently prepared by using a newly developed polygon scanner-based femtosecond laser photolithography system combined with inductively coupled discharge plasma reactive ...
Guanhua Wang +8 more
doaj +2 more sources
A Thorough Review of Emerging Technologies in Micro- and Nanochannel Fabrication: Limitations, Applications, and Comparison [PDF]
MicromachinesIn recent years, the field of micro- and nanochannel fabrication has seen significant advancements driven by the need for precision in biomedical, environmental, and industrial applications.
Koosha Karimi +5 more
doaj +2 more sources
Edge beads removal in a photolithography process through a polymer mold [PDF]
Songklanakarin Journal of Science and Technology (SJST), 2021 In this paper, a new approach for achieving a higher uniformity while spinning photoresist is presented. The proposed method allows to overcome the well-known problem of the edge beads formation, which shows either with circular, small or irregular ...
Stefania Torino +7 more
doaj +1 more source
Recent Advances on Nanocomposite Resists With Design Functionality for Lithographic Microfabrication
Frontiers in Materials, 2021 Nanocomposites formed by a phase-dispersed nanomaterial and a polymeric host matrix are highly attractive for nano- and micro-fabrication. The combination of nanoscale and bulk materials aims at achieving an effective interplay between extensive and ...
E. D. Martínez +15 more
doaj +1 more source
Low-cost photolithography system for cell biology labs
Current Directions in Biomedical Engineering, 2021 Soft lithography, a tool widely applied in biology and life sciences with numerous applications, uses the soft molding of photolithography-generated master structures by polymers.
Naggay Benjamin K. +5 more
doaj +1 more source
Frontiers in Sensors, 2022 Droplet microfluidics, which is the manipulation and handling of fluid in microscale channels, has excellent applications in material science, chemical synthesis, genetic analysis, drug discovery and delivery, organ on chips, and tissue engineering ...
Adedamola D. Aladese, Heon-Ho Jeong
doaj +1 more source
Frontiers in Neuroscience, 2021 The human brain contains a wide array of billions of neurons and interconnections, which are often simplified for analysis in vitro using compartmentalized microfluidic devices for neuronal cell culturing, to better understand neuronal development and ...
Hung Tri Tran +4 more
doaj +1 more source
Negative-tone molecular glass photoresist for high-resolution electron beam lithography [PDF]
Royal Society Open Science, 2021 A low molecular weight organic compound containing bis-phenol A backbone (BPA-6OH) is reported as a negative-tone photoresist. This material has a high glass transition temperature and excellent thermal stability.
Yafei Wang +5 more
doaj +1 more source
Nanopillar and nanohole fabrication via mixed lithography
Materials Research Express, 2020 We report a fabrication method for the production of nanopillar (NP) or nanohole (NH) arrays together with a micrometer-sized structure within a single layer.
Seung Hee Baek +7 more
doaj +1 more source