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Piezoelectric transducer accelerometer
The Journal of the Acoustical Society of America, 1985A piezoelectric transducer for use in accelerometer or vibration measurements comprises a seismic mass in the form of a casing which receives a pair of piezoelectric rings sandwiching between them a flange of a contact pin which extends axially from one end of the casing and is insulated with respect to this end by an insulating bushing.
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Surface micromachined piezoelectric accelerometers (PiXLs)
Journal of Microelectromechanical Systems, 2001The design, fabrication, and characterization of surface micromachined piezoelectric accelerometers are presented in this paper. The thin-film accelerometers employ zinc oxide (ZnO) as the active piezoelectric material, with different designs using either polysilicon or ZnO bimorph substrates.
D.L. DeVoe, A.P. Pisano
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Piezoelectric Rotational Accelerometers
Seismic Instruments, 2018The possibility of creating a piezoelectric seismometer for recording angular accelerations during rotary motion of soil and structures is substantiated. Two piezoelectric transducers with a common inertial mass are used in a single-component instrument.
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Piezoelectric force-balance accelerometer system
The Journal of the Acoustical Society of America, 1985A strong-motion force-balance accelerometer system responsive to accelerations along the axis of its housing, and having an annular diaphragm fixed with respect to the housing normal to the axis, the diaphragm having a winding extending around the periphery of the diaphragm and forming with the diaphragm the proof mass of the accelerometer system, a ...
James D. Kerr, Howard Thompson
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Prestressed piezoelectric accelerometer
The Journal of the Acoustical Society of America, 1983Accelerometer of the spring-mass type comprising, in a housing, a balanced vibrating mass, a spring constituted by at least one hollow piezoelectric element situated between the mass and the housing, as well as a fastening element traversing the mass and secured to the housing.
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Lightweight piezoelectric accelerometer
The Journal of the Acoustical Society of America, 1980A lightweight accelerometer in a casing or housing, having a very small base member to mechanically contact a surface, vibrations of which are to be determined; a piezoelectric element connected to the base, a seismic mass connected to the piezoelectric element, at least one thin circular diaphragm peripherically fixed to the housing, and with the base,
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Accuracy of piezoelectric pedometer and accelerometer step counts [PDF]
The Journal of Sports Medicine and Physical Fitness, 2017 This study aimed to assess step-count accuracy of a piezoeletric pedometer (Yamax PW/EX-510), when worn at different body parts, and a triaxial accelerometer (GT3X+), and to compare device accuracy; and identify the preferred location(s) to wear a pedometer.Sixty-three healthy adults (45.8±20.6 years old) wore 7 pedometers (neck, lateral right and left
Cruz, Joana, Brooks, Dina, Marques, Alda
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A fully surface-micromachined piezoelectric accelerometer
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), 2002A micromachined piezoelectric accelerometer has been designed and fabricated using an entirely surface-micromachining-based process flow. The device consists of a 1000 /spl mu/m long polysilicon cantilever structure with sputtered ZnO as the piezoelectric material. Experimental results show good linearity (
D.L. DeVoe, A.P. Pisano
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Single- and Triaxis Piezoelectric-Bimorph Accelerometers
Journal of Microelectromechanical Systems, 2008This paper describes the novel single- and triaxis piezoelectric-bimorph accelerometers that are built on parylene beams with ZnO films. The unamplified sensitivity and the minimum detectable signal of the fabricated single-axis accelerometer are measured to be 7.0 mV/g and 0.01 g, respectively, over a frequency range from 60 Hz to subhertz.
null Qiang Zou +3 more
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Piezoelectric accelerometers for ultrahigh temperature application
Applied Physics Letters, 2010High temperature sensors are of major importance to aerospace and energy related industries. In this letter, a high temperature monolithic compression-mode piezoelectric accelerometer was fabricated using YCa4O(BO3)3 (YCOB) single crystals. The performance of the sensor was tested as function of temperature up to 1000 °C and over a frequency range of ...
Shujun Zhang +4 more
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