Results 21 to 30 of about 3,239 (167)

A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

open access: yesMicrosystems & Nanoengineering, 2023
The piezoelectric coupling principle is widely used (along with capacitive coupling and piezoresistive coupling) for MEMS accelerometers. Piezoelectric MEMS accelerometers are used primarily for vibration monitoring.
Chang Ge, Edmond Cretu
doaj   +1 more source

A Miniaturized Piezoelectric MEMS Accelerometer with Polygon Topological Cantilever Structure

open access: yesMicromachines, 2022
This work proposes a miniaturized piezoelectric MEMS accelerometer based on polygonal topology with an area of only 868 × 833 μm2. The device consists of six trapezoidal cantilever beams with shorter fixed sides.
Chaoxiang Yang   +5 more
doaj   +1 more source

Fabrication of a Miniaturized ZnO Nanowire Accelerometer and Its Performance Tests

open access: yesSensors, 2016
This paper reports a miniaturized piezoelectric accelerometer suitable for a small haptic actuator array. The accelerometer is made with zinc oxide (ZnO) nanowire (NW) grown on a copper wafer by a hydrothermal process.
Hyun Chan Kim, Sangho Song, Jaehwan Kim
doaj   +1 more source

Lead-Free Piezoelectric Acceleration Sensor Built Using a (K,Na)NbO3 Bulk Ceramic Modified by Bi-Based Perovskites

open access: yesSensors, 2023
Piezoelectric accelerometers using a lead-free (K,Na)NbO3 (KNN) piezoceramic modified by a mixture of two Bi-based perovskites, Bi(Na,K,Li)ZrO3 (BNKLZ) and BiScO3 (BS), were designed, fabricated and characterized. Ring-shaped ceramics were prepared using
Min-Ku Lee   +2 more
doaj   +1 more source

A Novel Fetal Movement Simulator for the Performance Evaluation of Vibration Sensors for Wearable Fetal Movement Monitors

open access: yesSensors, 2020
Fetal movements (FM) are an important factor in the assessment of fetal health. However, there is currently no reliable way to monitor FM outside clinical environs.
Abhishek Kumar Ghosh   +10 more
doaj   +1 more source

Performance improvement of miniaturized ZnO nanowire accelerometer fabricated by refresh hydrothermal synthesis [PDF]

open access: yesRoyal Society Open Science, 2017
Miniaturized accelerometers are necessary for evaluating the performance of small devices, such as haptics, robotics and simulators. In this study, we fabricated miniaturized accelerometers using well-aligned ZnO nanowires.
Sangho Song   +4 more
doaj   +1 more source

Design of Piezoelectric Acceleration Sensor for Automobile Applications

open access: yesInternational Journal of Automotive Science and Technology, 2021
In this study, piezoelectric based compressive type accelerometer has been de-signed by using PZT-5A ceramics with bellewasher type spring. FEA analysis were carried out by using COMSOL.
Mert Gül, Murat Karaer, Aydın Doğan
doaj   +1 more source

Review: Fifty Years Plus of Accelerometer History for Shock and Vibration (1940–1996)

open access: yesShock and Vibration, 1999
This article summarizes the history of accelerometer development and the subsequent evolution of the commercial accelerometer industry. The focus is primarily on piezoelectric and piezoresistive accelerometers, although early resistance-bridge-type ...
Patrick L. Walter
doaj   +1 more source

A novel base strain sensitivity measurement system with steady harmonic excitation [PDF]

open access: yesMetrology and Measurement Systems, 2022
Considering the low accuracy and low efficiency of the traditional calibration method for base strain sensitivity of accelerometers, a novel base strain sensitivity calibration system with steady harmonic excitation is proposed.
Chuwei Ye
doaj   +1 more source

Short communication: Automated testing of accelerometer transverse sensitivity with a flexure-based XY compliant stage [PDF]

open access: yesMechanical Sciences, 2016
This paper presents the automated testing of accelerometer transverse sensitivity with a flexure-based compliant stage which can provide vibration on the XY plane.
T. Li, Y. Du, W. Ji, Z. Liu, C. Cai
doaj   +1 more source

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