Results 111 to 120 of about 7,096 (163)

Piezoelectric microflextensional actuator

SPIE Proceedings, 2004
This paper presents a novel micro flextensional actuator design consisting of bulk PZT bonded to a silicon microbeam. The fabrication process includes boron doping, EDP etching, dicing, and bonding to produce actuators with large displacements (8.7 μm) and gain factors (32) at 100V.
Jongpil Cheong, Srinivas A. Tadigadapa, Christopher D. Rahn   +2 more
openaire   +1 more source

Cryogenic piezoelectric actuators

SPIE Proceedings, 2009
In this paper, PMN-PT single crystal piezoelectric stack actuators and flextensional actuators were designed, prototyped and characterized for space optics applications. Single crystal stack actuators with footprint of 10 mm x10 mm and the height of 50 mm were assembled using 10 mm x10mm x0.15mm PMN-PT plates.
Xiaoning Jiang, William B. Cook, Wesley S. Hackenberger   +2 more
openaire   +1 more source

A study on the piezoelectric actuation performance of prestressed piezoelectric unimorph actuators

Journal of Intelligent Material Systems and Structures, 2014
The actuation performances of the prestressed piezoelectric unimorph actuators piezoelectric unimorph with mechanically prestressed substrate and thin layer unimorph driver are evaluated in terms of actuation displacement and force. During the performance tests, these prestressed piezoelectric unimorph actuators showed highly nonlinear behavior, in ...
openaire   +1 more source

Piezoelectric torsional actuator

Ferroelectrics, 1994
Piezoelectric torsional actuators have been developed from single ceramic cylindrical bodies using PZT based high d constant piezoelectric ceramics. The actuator geometry is able to produce rotational motion directly by DC voltage control without conventional complex conversion from XY direction motions.
Yoshiaki Fuda, Tetsuo Yoshida
openaire   +1 more source

Piezoelectric dispenser based on a piezoelectric-metal-cavity actuator

Review of Scientific Instruments, 2009
A piezoelectric dispenser has been fabricated based on the idea of a piezoelectric-metal-cavity (PMC) actuator. The PMC actuator consists of a metal ring sandwiched between two identical piezoelectric unimorphs. The radial contraction of the piezoelectric ceramic is converted into a flextensional motion of the unimorph, causing a large flexural ...
Lam, KH, Sun, C, Kwok, KW, Chan, HLW
openaire   +3 more sources

A microgripper using smart piezoelectric actuators

Proceedings. 2000 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2000) (Cat. No.00CH37113), 2002
The manipulation of very small objects is one of the most important tasks in microrobotics. Micromanipulators are required in all fields where precise manipulation of very small objects must be performed like microsurgery or assembly of MEMS. It is well known that downsizing the tools used in the macroworld is not appropriate to achieve tasks in the ...
Yassine Haddab, Nicolas Chaillet, Alain Bourjault   +2 more
openaire   +1 more source

Piezoelectric actuators 2006

Journal of Electroceramics, 2007
Piezoelectric actuators have been commercialized in various areas such as information technology, robotics, bio-, medical engineering, ecological and energy engineering. This paper reviews their recent application developments and foresees the future of piezoelectric actuators.
openaire   +1 more source

Piezoelectric multilayer actuator life test

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2011
Potential NASA optical missions such as the Space Interferometer Mission require actuators for precision positioning to accuracies of the order of nanometers. Commercially available multilayer piezoelectric stack actuators are being considered for driving these precision mirror positioning mechanisms. These mechanisms have potential mission operational
Stewart, Sherrit, Xiaoqi, Bao, Christopher M, Jones, Jack B, Aldrich, Chad J, Blodget, James D, Moore, John W, Carson, Renaud, Goullioud   +7 more
openaire   +2 more sources

Microswitch with Mixed Piezoelectric and Electrostatic Actuation

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference, 2007
In this article, a new concept of microswitch is investigated with the objective to decrease the actuation voltage. It consists in a component with two kinds of actuation mechanisms: piezoelectric actuation and electrostatic actuation. The structures were realized with a technology compatible with CMOS technology.
Chapuis, Francois, Defay, Emmanuel, Casset, Fabrice, Manceau, Jean-François, Bastien, Francois, Aïd, Marc   +5 more
openaire   +2 more sources

Internal electrode piezoelectric ceramic actuator

Ferroelectrics, 1983
An internal electrode multilayer piezoelectric ceramic actuator element has been investigated. An individual internal electrode has the same area as the element cross section area. It has no piezoelectric inactive part, so that it shows strain/field characteristics similar to plain piezoelectric ceramics. It can be driven by a relatively low voltage
Sadayuki Takahashi, Atsushi Ochi, Masatomo Yonezawa, Takeshi Yano, Takeshige Hamatsuki, Izumu Fukui   +5 more
openaire   +1 more source