Results 261 to 270 of about 51,857 (284)
Some of the next articles are maybe not open access.
Piezoelectrically Actuated Tunable Capacitor
Journal of Microelectromechanical Systems, 2006This paper describes the design, fabrication, and characterization of the first MEMS piezoelectric tunable capacitors employing zinc oxide (ZnO) actuation. Relatively simple design rules for the device-structure optimization for largest deflection are shown from simulation results based on theoretical equations.
C.-Y. Lee, E.S. Kim
openaire +1 more source
Plane ultrasonic piezoelectric actuators
Conference Record of the Power Conversion Conference - Yokohama 1993, 2002Two prototypes of plane ultrasonic piezoelectric actuators were experimentally constructed, and the fundamental characteristics were measured. The vibration mode of actuators was also analyzed by ANSYS, and compared with the experimental results.
N. Hoshi, A. Kawamura
openaire +1 more source
Piezoelectric micro-lens actuator
Sensors and Actuators A: Physical, 2015Abstract This paper reports the design, simulation, fabrication and characterization of a piezoelectric actuation structure for out-of-plane micro-lens movement. The structure consists of eight unimorph piezoelectric actuators symmetrically attached to a lens holding frame at one end through eight connecting beams and to the silicon substrate at the ...
A. Michael, C.Y. Kwok
openaire +1 more source
Mechatronics using piezoelectric actuators
Journal of the European Ceramic Society, 1999Abstract Mechatronics has enabled “intelligent” machinery such as car antiskid braking systems to be created. Any new automotive development has to incorporate a large number of mechanical servo functions, and the range of functions and requirements in servo technology is growing apace.
Peter Jänker +4 more
openaire +1 more source
Linear ultrasonic piezoelectric actuator
Conference Record of the IEEE Industry Applications Society Annual Meeting, 1991A prototype of the linear ultrasonic piezoelectric actuator (LUPA) with a traveling wave was constructed, and fundamental characteristics were measured. In the prototype, the traveling wave was synthesized by supplying two-phase high-frequency electricity to the piezoelectric elements attached to the copper bar.
A. Kawamura, N. Takeda
openaire +1 more source
Synthesis with Piezoelectric Actuation
2003Synthesis methods, such as topology optimization method, have been widely applied to design mechanical structures. Therefore, it is natural that they can also be applied to design smart materials and MEMS structures whose current development has been based on the use of simple analytical models, test of prototypes, and analysis using the finite element
openaire +1 more source