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Piezoresistive Pressure Sensors
2020Information about pressure and its measurement by means of pressure sensors is interesting in many different application areas. Contemporary applications, as for example the automotive industry, aerospace and medical technology, require ever smaller, adaptable and highly accurate pressure sensors.
Stephanus Büttgenbach +3 more
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Theory, technology and applications of piezoresistive sensors: A review
Sensors and Actuators A: Physical, 2018Sensors based on the detection of small resistance variations are universally recognized as piezoresistive. Being one of the simplest, most common and most investigated classes of sensors, continuous efforts are focused on creating improved devices with ...
A. Fiorillo, C. D. Critello, S. Pullano
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Surface and Interface Analysis, 2002
Abstract The design, fabrication and evaluation of various microprobes for applications in scanning probe microscopy are presented. A piezoresistive cantilever with an integrated micro‐tip, as a basic structure, enables surface topography measurements with a resolution up to 0.1 nm.
I. W. Rangelow +3 more
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Abstract The design, fabrication and evaluation of various microprobes for applications in scanning probe microscopy are presented. A piezoresistive cantilever with an integrated micro‐tip, as a basic structure, enables surface topography measurements with a resolution up to 0.1 nm.
I. W. Rangelow +3 more
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3D hybrid porous Mxene-sponge network and its application in piezoresistive sensor
Nano Energy, 2018High-performance pressure sensors attract widespread attention due to the potential applications in human-machine interaction and wearable electronics.
Yang Yue +12 more
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Piezoresistive Semiconductor Microphone
The Journal of the Acoustical Society of America, 1957A microphone using the piezoresistive effect of n-type germanium has been designed and constructed with a cantilever beam arrangement. Frequency response curves were taken in a sound field of 10 microbars with the microphone in a bridge type circuit and biased with 9 and 18 milliamperes. The microphone produces 10−11 watt in the flat low
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MEMS Piezoresistive Accelerometers
2014MEMS piezoresistive accelerometers are inertial sensors which measure acceleration of the reference frame to which they are attached. These devices provide extremely localized acceleration-induced stress sensing with low noise outputs and have been the subject of academic as well as commercial research for quite a few years. This chapter deals with the
Tarun Kanti Bhattacharyya +1 more
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MEMS thermal-piezoresistive resonators, thermal-piezoresistive oscillators, and sensors
Microsystem Technologies, 2022Lei Wei +5 more
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2009
In contrast to the fixed strain incorporated in logic devices for a fixed or constant improvement in device performance, piezoresistive strain sensors respond to variable strain through a modulation in the device resistance. The underlying physics of performance improvement in logic devices and strain transduction in piezoresistive strain sensors is ...
Yongke Sun +2 more
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In contrast to the fixed strain incorporated in logic devices for a fixed or constant improvement in device performance, piezoresistive strain sensors respond to variable strain through a modulation in the device resistance. The underlying physics of performance improvement in logic devices and strain transduction in piezoresistive strain sensors is ...
Yongke Sun +2 more
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Physical Review, 1956
It is pointed out that the piezoresistance phenomena in bismuth are consistent with some of the multivalley models of bismuth which have been proposed by various authors, and that certain features of these models are in fact implied by the piezoresistance data.
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It is pointed out that the piezoresistance phenomena in bismuth are consistent with some of the multivalley models of bismuth which have been proposed by various authors, and that certain features of these models are in fact implied by the piezoresistance data.
openaire +1 more source