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Experimental Investigations on New Characterization Method for Giant Piezoresistance Effect and Silicon Nanowire Piezoresistive Detection

Key Engineering Materials, 2015
This paper presents a novel and effective characterization method for giant piezoresistive properties of silicon nanowires by using the reference structures. This contrast detection approach investigates the influences of quantum size effect and surface defects effect on piezoresistive coefficients of silicon nanowires by direct comparison of the ...
Jia Hong Zhang   +5 more
openaire   +1 more source

Chemical Detection with MOF-Functionalized Piezoresistive Microcantilever Arrays

ECS Meeting Abstracts, 2007
Abstract not Available.
Arnab Choudhury   +9 more
openaire   +1 more source

Sub-ppm detection of vapors using piezoresistive microcantilever array sensors

Nanotechnology, 2008
The performance of microfabricated piezoresistive cantilever array sensors has been evaluated using various vapors of volatile organic compounds including alkanes with different chain length from 5 (n-pentane) to 14 (n-tetradecane). We demonstrate that piezoresistive microcantilever array sensors have the selectivity of discriminating individual ...
Yoshikawa, Genki   +8 more
openaire   +3 more sources

Low-Noise Chemical Detection with a Piezoresistive Microcantilever Array

ECS Transactions, 2006
Piezoresistive microcantilever systems are well suited for chemical sensing with low detection limits. A major hurdle in the realization of such systems is measurement noise associated with DC piezoresistance measurements. A piezoresistive microcantilever array has been fabricated and phase sensitive detection methods are used for realization of ...
P. J. Hesketh   +4 more
openaire   +2 more sources

Ultrahigh-Sensitivity Piezoresistive Pressure Sensors for Detection of Tiny Pressure

ACS Applied Materials & Interfaces, 2018
High-sensitivity pressure sensors are crucial for the ultrasensitive touch technology and E-skin, especially at the tiny-pressure range below 100 Pa. However, it is highly challenging to substantially promote sensitivity beyond the current level at several to 200 kPa-1 and to improve the detection limit lower than 0.1 Pa, which is significant for the ...
Hongwei Li   +5 more
openaire   +2 more sources

Label-Free Sugar Detection Using Phenylboronic Acid-Functionalized Piezoresistive Microcantilevers

Analytical Chemistry, 2008
By appropriate surface functionalization using a thiolated phenylboronic acid derivative, gold-coated piezoresistive microcantilevers responsive to analytes having vicinal cis-diols were fashioned. A reference, uncoated cantilever permitted reliable subtraction of background signal (i.e., differential measurement).
Gary A, Baker   +2 more
openaire   +2 more sources

2D Lump/Artery Detection by Using Piezoresistive Force Sensors

ASME 2010 5th Frontiers in Biomedical Devices Conference and Exhibition, 2010
Detection of harder tissues within softer tissues has great advantages in both surgical and clinical applications. In surgical applications, surgeons need to precisely identify the location of potential arteries within softer surrounding tissues to either avoid damage to them or fix them.
M. Kalantari   +4 more
openaire   +1 more source

Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces

Microelectronic Engineering, 2008
In order to obtain a sensor with force resolution better than 100pN for biomolecular detection, U-shaped piezoresistive cantilevers made of crystalline silicon have been fabricated. The resistors have been defined by ionic implantation of As+, yielding a shallow and thin resistor and they have been patterned parallel to the (100) crystallographic ...
G. Villanueva   +4 more
openaire   +1 more source

Fabrication of piezoresistive nanocantilevers for ultra-sensitive force detection

Measurement Science and Technology, 2008
This paper presents the design, fabrication and characterization method of piezoresistive nanocantilevers for ultra-sensitive force detection application. A shallow boron-doped layer as thin as 40 nm is achieved using spin-on diffusion. The piezoresistive nanocantilevers are patterned by electron beam (EB) lithography and fast atom beam (FAB) etching ...
Y G Jiang, T Ono, M Esashi
openaire   +1 more source

Piezoresistive and piezoelectric MEMS strain sensors for vibration detection

SPIE Proceedings, 2007
Both piezoresistive and piezoelectric materials are commonly used to detect strain caused by structural vibrations in macro-scale structures. With the increasing complexity and miniaturization of modern mechanical systems such as hard disk drive suspensions, it is imperative to explore the performance of these strain sensors when their dimensions must ...
Stanley Kon   +2 more
openaire   +1 more source

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