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Key Engineering Materials, 2015
This paper presents a novel and effective characterization method for giant piezoresistive properties of silicon nanowires by using the reference structures. This contrast detection approach investigates the influences of quantum size effect and surface defects effect on piezoresistive coefficients of silicon nanowires by direct comparison of the ...
Jia Hong Zhang +5 more
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This paper presents a novel and effective characterization method for giant piezoresistive properties of silicon nanowires by using the reference structures. This contrast detection approach investigates the influences of quantum size effect and surface defects effect on piezoresistive coefficients of silicon nanowires by direct comparison of the ...
Jia Hong Zhang +5 more
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Chemical Detection with MOF-Functionalized Piezoresistive Microcantilever Arrays
ECS Meeting Abstracts, 2007Abstract not Available.
Arnab Choudhury +9 more
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Sub-ppm detection of vapors using piezoresistive microcantilever array sensors
Nanotechnology, 2008The performance of microfabricated piezoresistive cantilever array sensors has been evaluated using various vapors of volatile organic compounds including alkanes with different chain length from 5 (n-pentane) to 14 (n-tetradecane). We demonstrate that piezoresistive microcantilever array sensors have the selectivity of discriminating individual ...
Yoshikawa, Genki +8 more
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Low-Noise Chemical Detection with a Piezoresistive Microcantilever Array
ECS Transactions, 2006Piezoresistive microcantilever systems are well suited for chemical sensing with low detection limits. A major hurdle in the realization of such systems is measurement noise associated with DC piezoresistance measurements. A piezoresistive microcantilever array has been fabricated and phase sensitive detection methods are used for realization of ...
P. J. Hesketh +4 more
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Ultrahigh-Sensitivity Piezoresistive Pressure Sensors for Detection of Tiny Pressure
ACS Applied Materials & Interfaces, 2018High-sensitivity pressure sensors are crucial for the ultrasensitive touch technology and E-skin, especially at the tiny-pressure range below 100 Pa. However, it is highly challenging to substantially promote sensitivity beyond the current level at several to 200 kPa-1 and to improve the detection limit lower than 0.1 Pa, which is significant for the ...
Hongwei Li +5 more
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Label-Free Sugar Detection Using Phenylboronic Acid-Functionalized Piezoresistive Microcantilevers
Analytical Chemistry, 2008By appropriate surface functionalization using a thiolated phenylboronic acid derivative, gold-coated piezoresistive microcantilevers responsive to analytes having vicinal cis-diols were fashioned. A reference, uncoated cantilever permitted reliable subtraction of background signal (i.e., differential measurement).
Gary A, Baker +2 more
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2D Lump/Artery Detection by Using Piezoresistive Force Sensors
ASME 2010 5th Frontiers in Biomedical Devices Conference and Exhibition, 2010Detection of harder tissues within softer tissues has great advantages in both surgical and clinical applications. In surgical applications, surgeons need to precisely identify the location of potential arteries within softer surrounding tissues to either avoid damage to them or fix them.
M. Kalantari +4 more
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Crystalline silicon cantilevers for piezoresistive detection of biomolecular forces
Microelectronic Engineering, 2008In order to obtain a sensor with force resolution better than 100pN for biomolecular detection, U-shaped piezoresistive cantilevers made of crystalline silicon have been fabricated. The resistors have been defined by ionic implantation of As+, yielding a shallow and thin resistor and they have been patterned parallel to the (100) crystallographic ...
G. Villanueva +4 more
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Fabrication of piezoresistive nanocantilevers for ultra-sensitive force detection
Measurement Science and Technology, 2008This paper presents the design, fabrication and characterization method of piezoresistive nanocantilevers for ultra-sensitive force detection application. A shallow boron-doped layer as thin as 40 nm is achieved using spin-on diffusion. The piezoresistive nanocantilevers are patterned by electron beam (EB) lithography and fast atom beam (FAB) etching ...
Y G Jiang, T Ono, M Esashi
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Piezoresistive and piezoelectric MEMS strain sensors for vibration detection
SPIE Proceedings, 2007Both piezoresistive and piezoelectric materials are commonly used to detect strain caused by structural vibrations in macro-scale structures. With the increasing complexity and miniaturization of modern mechanical systems such as hard disk drive suspensions, it is imperative to explore the performance of these strain sensors when their dimensions must ...
Stanley Kon +2 more
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