Results 231 to 240 of about 2,774,946 (270)

Silicon Microcantilevers with Piezoresistive and MSE Detection

2009 Spanish Conference on Electron Devices, 2009
We have fabricated 340 nm thick U-shaped microcantilevers with electrical output to be used as sensors for biomolecular detection, which requires a force resolution better than 100 pN. Piezoresistors or MOS transistors have been used as integrated electromechanical transducers. The devices have been fabricated by N-type doping using As ion implantation
Tosolini, G., Villanueva, G., Bausells, J., García Loureiro, A., Iglesias, N. S., Aldegunde Rodríguez, M. A., Comesana Figueroa, E.   +6 more
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Piezoresistive Microcantilevers for Biomolecular Force Detection

2007 Spanish Conference on Electron Devices, 2007
This paper reports the development of piezoresistive microcantilevers for the detection of biomolecules by the measurement of intermolecular binding forces. The detection of the small forces involved in molecular recognition (
Villanueva, G., Rius, G., Montserrat, J., Perez-Murano, F., Bausells, J.   +4 more
openaire   +2 more sources

Miniature piezoresistive sensor for detecting volatile organic components

Sensors and Actuators B: Chemical, 2021
Abstract This paper reports a piezoresistive gas sensor, which detects the stress of polymer swollen due to sorption of trace gas molecules. The sensor consists of a Si-polymer composite and a Si cantilever with a piezoresistor at the support. The stress is transformed via the cantilever lateral deflection to the strain at the piezoresistor at the ...
Masaya Toda, Krzysztof Moorthi, Takumi Hokama, Zhuqing Wang, Mai Yamazaki, Takahito Ono   +5 more
openaire   +1 more source

Piezoresistive cantilever platform for label-free detection of molecules

2014 IEEE 5th Latin American Symposium on Circuits and Systems, 2014
MEMS sensors can be used for label-free detection in many different biological studies. Usually in this procedure the presence of special substance in a sample can be monitored based on its interaction and binding with specific probe molecules which are immobilized on a sensor.
Bahareh Gholamzadeh, Ebrahim Ghafar-Zadeh, Falah R. Awwad, Mohamad Sawan   +3 more
openaire   +1 more source

Microbridges simulation for piezoresistive gas sensors detection

Proceedings. International Semiconductor Conference, 2003
A microbridges software simulation has been made using "CoventorWare 2001.3", from Coventor Inc. Within this program, we used the piezoresistive module. The microbridges are made of silicon, and the piezoresistive part is the device itself. The resonant microbridges change their resistance when the gas-sensitive layer adsorbs gas molecules from the ...
B. Firtat, C. Moldovan, D. Dascalu
openaire   +1 more source

Polysilicon piezoresistive cantilevers for intermolecular force detection

Conference on Electron Devices, 2005 Spanish, 2005
We describe the development of polycrystalline silicon piezoresistive micro/nanocantilevers for the measurement of intermolecular forces in biochemical sensing. The cantilevers have been fabricated both in a dedicated technology and in a commercial CMOS technology with an additional micromachining postprocessing. The sensitivity and resolution required
Villanueva, G., Bausells, J., Montserrat, J., Perez-Murano, F.   +3 more
openaire   +1 more source

Experimental Investigations on New Characterization Method for Giant Piezoresistance Effect and Silicon Nanowire Piezoresistive Detection

Key Engineering Materials, 2015
This paper presents a novel and effective characterization method for giant piezoresistive properties of silicon nanowires by using the reference structures. This contrast detection approach investigates the influences of quantum size effect and surface defects effect on piezoresistive coefficients of silicon nanowires by direct comparison of the ...
Jia Hong Zhang, Min Yang, Qing Quan Liu, Fang Gu, Min Li, Yi Xian Ge   +5 more
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A silicon micromachined vibrating gyroscope with piezoresistive detection and electromagnetic excitation

Proceedings of Ninth International Workshop on Micro Electromechanical Systems, 2002
In this paper, a new silicon resonant gyroscope (angular rate sensor) is presented. Its concept is based on the tuning fork principle: two proof masses suspended by four beams are vibrating antiphase in one plane. When rotating, the proof masses are moving out of this plane due to the Coriolis force. The excitation is provided by electromagnetic forces
Paoletti, F., Grétillat, M.-A., de Rooij, N. F.   +2 more
openaire   +2 more sources

Low-Noise Chemical Detection with a Piezoresistive Microcantilever Array

ECS Transactions, 2006
Piezoresistive microcantilever systems are well suited for chemical sensing with low detection limits. A major hurdle in the realization of such systems is measurement noise associated with DC piezoresistance measurements. A piezoresistive microcantilever array has been fabricated and phase sensitive detection methods are used for realization of ...
P. J. Hesketh, Arnab Choudhury, Zhiyu Hu, Thomas Thundat, Steven R. Newcomb   +4 more
openaire   +2 more sources

Piezoresistive and piezoelectric MEMS strain sensors for vibration detection

SPIE Proceedings, 2007
Both piezoresistive and piezoelectric materials are commonly used to detect strain caused by structural vibrations in macro-scale structures. With the increasing complexity and miniaturization of modern mechanical systems such as hard disk drive suspensions, it is imperative to explore the performance of these strain sensors when their dimensions must ...
Stanley Kon, Kenn Oldham, Roberto Horowitz   +2 more
openaire   +1 more source