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Remote infrared radiation detection using piezoresistive microcantilevers
Applied Physics Letters, 1996A novel micromechanical infrared (IR) radiation sensor has been developed using commercially available piezoresistive microcantilevers. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress between the top layer (coating) and the substrate.
P. G. Datskos +5 more
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Nanomechanical detection of phospholiposome using piezoresistive cantilever sensor
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05., 2005Here, we firstly report the detection of phospholiposomes by the highly sensitive microfabricated piezoresistive cantilever sensor chip and the phosphatidylserine (PS) recognition protein C2A which is chemically immobilized on the sensor surface. The signal created from the bending motion of the piezoresistive cantilever after the phospholiposome ...
S.J. Hyun, H.S. Kim, Y.J. Kim, H.I. Jung
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Viral detection using an embedded piezoresistive microcantilever sensor
Sensors and Actuators A: Physical, 2003The detection of aerosol-based vaccinia virus and solution-based vaccinia virus has been studied using a new type of microsensor design. In the embedded piezoresistive microcantilever (EPM) sensor, a tiny piezoresistive microcantilever is embedded or partially embedded into an active sensing material whose volumetric response to the presence of an ...
R.L. Gunter +4 more
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Chemical Detection with MOF-Functionalized Piezoresistive Microcantilever Arrays
ECS Meeting Abstracts, 2007Abstract not Available.
Arnab Choudhury +9 more
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Simultaneous detection of particles and airflow with a MEMS piezoresistive cantilever
Measurement Science and Technology, 2013This paper describes a particle and airflow sensor using a MEMS piezoresistive cantilever with the dimensions of 250 µm × 200 µm × 0.29 µm. The sensor structure is simple and detects both the airflow velocity and particle collisions by measuring the fractional resistance change due to the cantilever bending.
Hidetoshi Takahashi +3 more
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Fabrication of piezoresistive nanocantilevers for ultra-sensitive force detection
Measurement Science and Technology, 2008This paper presents the design, fabrication and characterization method of piezoresistive nanocantilevers for ultra-sensitive force detection application. A shallow boron-doped layer as thin as 40 nm is achieved using spin-on diffusion. The piezoresistive nanocantilevers are patterned by electron beam (EB) lithography and fast atom beam (FAB) etching ...
Y G Jiang, T Ono, M Esashi
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Characterization of a Piezoresistive Microcantilever as a Sensor for Detecting the Bio-Molecules
Materials Science Forum, 2006We propose an electrical detection method for detecting the various bio-molecules effectively with microcantilevers. The piezoresistive microcantilevers were fabricated employing surface micromachining technique that has attractive advantages in terms of cost efficiency, simplicity, and ability of fabricating in array.
Kyung-Ah Yoo +6 more
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Improvement of Piezoresistive Microcantilever Beams for Gas Detection and Sensing
2011Past work associated with this project has focused on both symmetric and asymmetric base arrangement piezoresistive microcantilever beams used for gas detection. Symmetric piezoresistive microcantilever beams have been shown to detect the presence of surrounding gas through changes in the resonance behavior of the beam; however, the device sensitivity ...
Ni Wang +3 more
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A High Accuracy Resonant Pressure Sensor with Lateral Driven and Piezoresistive Detection
2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2019A novel structure of resonant pressure sensor with integrated comb is presented with the electrostatic drive and piezoresistive detection. This design realizes double symmetric ‘H’ beams assembled in one pressure diaphragm to realize symmetric-lateral vibration.
Xiangguang Han +5 more
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